Jtekt Corporation

Cnk Co., Ltd.

Hiroyuki Hashitomi

Junji Ando

Tomoo Suzuki

Tomoki Ogawa

Toshiyuki Saito

Masahiro Suzuki

Kazuyoshi Yamakawa

Daigo Yamamoto

Akinori Iwai

Nobuyoshi Yoshimura

Toshiya Kubo

Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.

Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device

A formation method of a coating that coats a coated body with the coating includes: generating cylindrical plasma in a vacuum deposition chamber as well as supplying material gas into the vacuum deposition chamber; applying pulse voltage to the coated body; and attaching a shield member that shields an uncoated member to an uncoated part where the coating of the coated body is not formed with separation spacing over a coated part where the coating is to be formed for preventing decrease of hardness of the coating in the coated part.

Formation method of coating

A sliding member has a base material whose surface is at least partially covered with a DLC film, wherein an intermediate layer is interposed between the base material and the DLC film, and the intermediate layer has a multilayer structure obtained by stacking a first Cr layer, a CrN layer and a second Cr layer successively from the side closer to the base material.

Sliding member

Growing community of inventors

Anjo, Japan

Hiroyuki Hashitomi