Dai Nippon Printing Co., Ltd.

Hiroyuki Fujita

Katsunori Tsuchiya

Ryoichi Ohigashi

Yoshio Mita

Katsunori Dai Nippon Printing Co Ltd Tsuchiya

Ryoichi Dai Nippon Printing Co Ltd Ohigashi

There are provided an apparatus for fine pattern formation, which can form a fine pattern with high accuracy by direct writing with ink, a production process of fine nozzles provided in the apparatus for fine pattern formation, and a method for fine pattern formation. Fine pattern formation with high accuracy could have been realized by the apparatus for fine pattern formation, comprising: a silicon substrate; a plurality of fine holes which extend through the silicon substrate from the surface of the silicon substrate to the back surface of the silicon substrate and have a silicon oxide layer on the wall surface thereof; fine nozzles which are protruded, integrally with the silicon oxide layer, on the back surface side of the silicon substrate from each opening of the fine holes; a silicon nitride layer provided on the surface and side of the silicon substrate; a support member provided on the surface side of the silicon substrate; an ink passage for supplying ink to the opening of each fine hole on the surface side of the silicon substrate; and an ink supplying device connected to the ink passage.

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Tokyo-to, Japan

Hiroyuki Fujita