Ebara Corporation

Hiroyasu Kawashima

Shinichi Sekiguchi

Hiroaki Ogamino

Toshiharu Nakazawa

Toru Osuga

Katsuaki Usui

Koichi Iwasaki

Jie Yuan Lin

Seiji Shimada

Yuji Ishii

A turbo vacuum pump comprising a suction partA that sucks gas in an axial direction; a discharge partthat discharges the gas sucked by the suction partA, the discharge parthaving a plurality of rotating impellersand a stationary impellerarranged so as to be opposed to each of the plurality of rotating impellers; and a rotating shaftthat rotates the plurality of rotating impellers, wherein the plurality of rotating impellersinclude at least one stage of a first turbine impellerfor discharging the sucked gas in the axial direction, the first turbine impellerbeing fixed to a suction-part-side end faceof the rotating shaft, and at least one stage of a second turbine impellerfixed to the rotating shaftthat extends through the second turbine impeller, the second turbine impellerbeing arranged downstream of the first turbine impeller

Turbo vacuum pump

A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

Turbo vacuum pump and semiconductor manufacturing apparatus having the same

A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

Flowmeter having a float and a displacement sensor

Growing community of inventors

Tokyo, Japan

Hiroyasu Kawashima