Aisin Seiki Kabushiki Kaisha

Hiroya Taniguchi

Yoshihiro Naito

Atsuyuki Miura

Hiroyasu Nomachi

Hiroki Okawara

A multistage vacuum pump assembly comprising plural independent pumping stages connected in series is disclosed. A first pumping stage located at one end of the series is connected to a room to be evacuated, and a final pumping stage located at the other end of the series is connected to the atmosphere. At least the first pumping stage comprises plural pumps connected mutually in parallel, so that the plural pumps together can achieve the vacuum capacity expected without being driven to an excessive rate of rotation.

Multistage vacuum pump assembly

A multistage vacuum pump unit having a plurality of separate single-stage pumps connected in series with each other by exhaust pipes, the exhaust pipes each connecting a suction port of one of the adjacent single-stage pumps with an exhaust port of another of the adjacent single-stage pump; motors for driving the separate single-stage pumps respectively; driving device for varying a revolution of one of the single-stage pumps that is at least in contact with an atmospheric side; driving current detection device for detecting a driving current of the motor for driving the single-stage pump that is in contact with the atmospheric side; pressure detection device for detecting a pressure at a vacuum-side inlet; and control device for controlling revolutions of the motors of the single-stage pumps based on the pressure detected by the pressure detection device.

Multistage vacuum pump unit

A stirling cycle apparatus having a buffer connecting the compressor piston back room with the expansion piston back room. The apparatus also has a diaphragm which divides the buffer and the crank room. The buffer reduces the pressure changes between the both sides of the diaphragm so that the stress to the diaphragm can be reduced.

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Hekinan, Japan

Hiroya Taniguchi