Sanyo Electric Co., Ltd.

Hirotoshi Iwase

Seizo Kato

Masatoshi Ochiai

Tetsuro Endo

An evaporation apparatus comprises an elongated crucible having an upper opening and storing an evaporation material, an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating the evaporation material stored in the crucible, and has an opening through which the evaporation material which is vaporized by heating can pass through, and a fixing member for pressing and fixing the electric heater onto the elongated crucible. Further, between the fixing member and the electric heater, an angle member having surface portions respectively fitting onto an edge portion of the upper surface and an upper portion of the side surface of the elongated crucible is provided along the longitudinal direction of the elongated crucible. A pressing force from the fixing member is made to exert onto the electric heater via the angle member to bring the electric heater into close contact with the elongated crucible.

Evaporation apparatus

An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.

Fixing member for evaporation apparatus

When electric current is caused to flow in an electric heater which is disposed on an elongated crucible, an evaporation material stored within the crucible and located under the electric heater is heated and the evaporation material is vaporized and discharged through an opening of the electric heater. Because a metal coating is applied to the outer surface of the elongated crucible, external radiation of heat from the crucible is reduced, and the heat generated by the electric heater is more efficiently used to increase the temperature of the evaporation material. In this manner, efficient heating for the interior of the elongated crucible and uniform temperature within the crucible can be achieved.

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Gunma, Japan

Hirotoshi Iwase