Olympus Corporation

Silicon Quest Kabushiki-kaisha

Other

Olympus Optical Company, Ltd.

Hirotoshi Ichikawa

Fusao Ishii

Yoshihiro Maeda

Naoya Sugimoto

Kazuma Arai

Kazuhiro Watanabe

Yoshiaki Horikawa

Taro Endo

Hirokazu Nishino

Akira Shirai

Motohiro Atsumi

Fuminori Ueno

Nobuo Miyairi

Ryotaro Hanayama

A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.

Method for manufacturing a mirror device by means of a plurality of sacrificial layers

A color display device including: at least one spatial light modulation element forming a display picture by modulated light obtained by modulating illumination light, a color sequential light generation device changing in a time series the illumination light or the modulated light into multiple groups of different color lights in one frame of a display period of the display picture, a control device controlling the spatial light modulator, and a color sequential light generation device based on the input picture data. The control device controls the spatial light modulator and the color sequential light generation device to change the ratio of the display time of each color of the reflected light time-shared in the display period of the frame depending on the character and/or the set value of the input picture data.

Color display system

The present invention provides a projection apparatus that includes a mirror element and a drive circuit for driving a laser light source for projecting an illumination light. The projection apparatus further includes mirror device for modulating the illumination light and a projection lens for projecting the modulated light from the mirror element. The mirror device is disposed on a device substrate and packaged in a package substrate made of a transparent silicon material with a metallic thermal transfer path connected to the device substrate and a cover glass covering the package substrate. The distance between the mirror and the bottom surface of the cover glass is larger than the focal length of the projection lens.

Projection display system using laser light source

A video display system includes a plurality of primary color light sources; and a spatial light modulator (SLM) for modulating an illumination light emitted from at least one of the plurality of primary light sources. The video display system further includes a display controller for controlling a process to display a sequence of video images within a period of one frame comprising each of a plurality of primary colors and each of a plurality of complementary colors to minimize a number of emissions of each of the plurality of primary color light sources and also displaying the video images of the colors of the plurality of primary colors and the plurality of complementary colors in sequence.

Video display system

A projection apparatus comprising a micromirror device for reflecting and modulating a light emitted from a light source to project a display an image on a display screen. The projection apparatus further includes a projection optical system comprises an adjustable aperture for adjusting an aperture ratio to control an amount of output light reflected from the micromirror device to the image display screen.

Projection apparatus using micromirror device

The present invention discloses a projection apparatus comprising: a light source for emitting illumination light; a mirror device comprising a plurality of mirrors for generating an image by reflecting the illumination light toward a projecting direction by means of a deflecting operation; and a projection optical system which is placed in the optical axis of reflection light in the projecting direction of the illumination light incident to the mirror device and which projects the reflection light, wherein the optical axis of the illumination light incident to the mirror device and the optical axis of the reflection light in the projecting direction forms an angle that is larger than the expansion angle &#x3b1; of the flux of the illumination light that satisfies NA=n*sin &#x3b1;, where NA is the numerical aperture of the flux of the illumination light, and n is the reflectance.

Projection apparatus with coherent light source

A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.

Mircromirror device having a vertical hinge

The present invention discloses a mirror device that includes a mirror element which further comprising an elastic hinge and a mirror and which modulates incident light emitted from a light source, a device substrate on which a drive circuit for driving the mirror element is placed, a package substrate which is made of transparent glass or a silicon material and on which the device substrate is placed, a metallic thermal transfer path connected to the device substrate, and a cover glass connected to the package substrate so that the device substrate is covered.

Package for micromirror device

A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.

Mirror device

A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Mirror device with an anti-stiction layer

The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for supporting the mirror and to deflect the mirror to a range of deflecting angles; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.

Mirror device comprising drive electrode equipped with stopper function

This invention provides a display system that receives an image signal containing a binary data of N bits, wherein N is a positive integer, for displaying an image with a grayscale corresponding to the binary data. The display system further includes a data converter for converting M-bit of the N bits of the binary data into a non-binary data, wherein M is a positive integer and N&#x2267;M, for applying the non-binary data as a sub-frame in controlling the gray scale in displaying the image. In an exemplary embodiment, the data converter converts consecutive M-bit of the N bits of the binary data into the non-binary data. The display system further includes a spatial light modulator (SLM) having a plurality of pixel elements and the SLM receiving the non-binary data of M bits for controlling the pixel elements.

Control system for micromirror device

The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

Mirror device and MEMS device comprising layered electrode

The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer.

Structure body electrically connected via semiconductor material layer

A mirror device, comprising: a mirror; an electrode which is placed on a substrate and on which surface a cavity is formed; and a hinge placed between the mirror and electrode, wherein the hinge is connected to the cavity of the electrode.

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Hachioji, Japan

Hirotoshi Ichikawa