Ulvac, Inc.

Hiroto Uchida

Takeshi Masuda

Koukou Suu

Junpei Yuyama

Takakazu Yamada

Masahiko Kajinuma

Masaki Uematsu

Masao Murata

Yasuzo Tanaka

Koji Hane

Hiroshi Koshina

Takanori Tsuji

Mitsuru Yahagi

Isao Kimura

Yuya Inoue

Takehito Jinbo

Yuko Taguchi

Masashi Ueda

Michihiro Takayama

A thin film-forming apparatus, for ensuring uniform plane distribution of properties of a film formed on a substrate surface, has a gas-supply portsupplying a gas mixture from a gas-mixing chamberto a shower head. The port is arranged at the peripheral portion on the bottom face of the gas-mixing chamber so that the gas mixture flows from the upper peripheral region of the head towards the center thereof. An exhaust portdischarging the exhaust gas generated in the film-forming chamberis arranged at a position lower than the level of a stageduring film-formation directing the exhaust gas towards the side wall of the chamberand discharging the exhaust gas through the exhaust port. The stageis designed to move freely up and down to adjust the distance between the shower headand substrate S.

Apparatus for the preparation of film

The present invention relates to a thin-film solar battery module manufacturing method and a thin-film solar battery module that are capable of securing dielectric breakdown voltage characteristics of high reliability. An important aspect of the invention relates to forming isolation trenches along peripheral regions of a transparent substrate and thereafter selectively removing electrode and semi-conductor layers to arrive at the thin film solar battery module.

Thin-film solar battery module manufacturing method

Film-forming apparatus including a film-forming vacuum chamber having a stage for a substrate, a chamber for mixing gas comprising a raw gas and a reactive gas connected to the film-forming chamber, a chamber for vaporizing the raw material, and a gas head for introducing the mixed gas into the film-forming chamber, disposed on the upper face of the film-forming chamber and opposed to the stage. Particle traps with controllable temperatures are positioned between the vaporization chamber and the mixing chamber and on the downstream side of the mixing chamber. When forming a thin film with the apparatus, a reactive gas and/or a carrier gas are passed through the film-forming chamber while opening a valve in a by-pass line, connecting the primary side to the secondary side of the particle trap arranged at the downstream side of the mixing chamber. The valve is then closed and the film-forming operation is initiated.

Film-forming apparatus and film-forming method

Providing a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrixin the shape of a lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of inkare jetted onto each of the spacer forming positions on one of the opposite substrates E. The gap between the opposite substrates E can be securely maintained at a constant for filling with liquid crystal.

Spacer forming method and spacer forming apparatus

According to a first invention, since a flow of a spacer dispersed liquid is formed in a transporting chamber separated from a discharging chamber by an internal filter, the spacer dispersed liquid is stably discharged through an ejection hole, while the discharging chamber on a side of a nozzle plate is not affected by the flow of the spacer dispersed liquid. According to a second invention, since a spacer dispersed liquid does not flow inside a discharging chamber in a printing state in which the spacer dispersed liquid is discharged, the spacer dispersed liquid is stably discharged through an ejection hole. To the contrary, since the spacer dispersed liquid is directed inside both the discharging chamber and the transporting chamber in a waiting state in which the spacer dispersed liquid is not discharged, spacer particles in the spacer dispersed liquid do not settle.

Head module, printing apparatus, and printing method

Growing community of inventors

Kanagawa-ken, Japan

Hiroto Uchida