Ushio Denki Kabushiki Kaisha

Hiroto Sato

Yoshihiro Horikawa

Akihiko Sugitani

Yusuke Teramoto

Takashi Ito

Kazunori Bessho

Tatsushi Igarashi

Yukiharu Tagawa

Kiyoyuki Kabuki

Christof Metzmacher

Hironobu Yabuta

Achim Weber

Takahiro Shirai

Rolf Theo Anton Apetz

Katsumi Sugaya

Daiki Yamatani

Noritaka Ashizawa

Kazuhiro Akiyama

Hermann Giese

Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.

Foil trap and light source device using such foil trap

A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shellswith different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shellsare arranged in a nested shape and the ends thereof are held by a holding structure. A cooling channel, through which a cooling medium flows is mounted at the reflective shellin the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell. By using molybdenum as the material for the reflective shells, the heat deformation can be suppressed even further, and by providing cooling channels in the holding structure, the collector mirror assembly can be cooled even more efficiently and a heat deformation thereof can be suppressed.

Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly

In an EUV focusing mirror in which there are several thin concave nested high precision mirrors in the form of an ellipsoid of revolution, a paraboloid of revolution, a Wolter type or the like, the sides which do not constitute the reflection surfaces are made in the shape of a knife edge at the radiation incident ends of the respective mirrors in order not to be shielded by the thickness of the radiation incidence sides of the respective mirrors. Likewise, the radiation exit ends of the respective mirrors are made in the form of a knife edge. This yields an advantageous far-field distribution use of the mirrors for an EUV radiation source device and the degree of reduction of the light intensity can be made smaller than in the conventional case.

Extreme UV radiation focusing mirror and extreme UV radiation source device

Electrode ablation is controlled in EUV light source device that gasifies a raw material by irradiation with an energy beam and produces a high-temperature plasma using electrodes a raw material for plasma is dripped in a space in the vicinity of, but other than, the discharge region and from which the gasified raw material can reach the discharge region between the discharge electrodes and a laser beam irradiates the high-temperature plasma raw material. A gasified high-temperature plasma raw material, gasified by the laser beam, spreads in the direction of the discharge region. At this time, power is applied on a pair of discharge electrodes, the gasified high-temperature plasma raw material is heated and excited to become a high-temperature plasma, and EUV radiation is emitted. This EUV radiation is collected by an EUV collector mirror and sent to lithography equipment.

Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation

To both increase the efficiency of conversion into EUV radiation energy and also increase the amount of emerging EUV radiation in an EUV source a discharge tube is connected to a gas supply space for supply of the discharge gas which in located radially with respect to an optical axis. The discharge gas is supplied to the discharge space through the gas supply space, passes through the center opening of the anode, emerges from the discharge part and is afterwards evacuated from an evacuation opening. The anode and the cathode are connected to a pulse current source. Discharge plasma is produced and EUV radiation is formed by a heavy current pulse from the pulse current source within the discharge space of the discharge tube. The EUV radiation which has formed passes through a through-opening of the anode and is emitted to the outside.

Extreme ultraviolet source

A lamp seal ( ) of functionally gradient seal material and a lead bar ( ) that is fixed to the seal piece ( ), which seal piece is formed an inorganic layer with insulative properties and a number of mixed layers that are each mixtures of conductive inorganic materials and insulative inorganic materials, such that the proportion of conductive inorganic materials increases gradually in the direction of layering. A hole is formed extending in the direction of layering such that the lead bar can be fixed into the seal material with a sleeve-shaped metallic part made of a high-melting-point metal separating the outer periphery of the lead bar from the seal material. A lamp made with an air-tight seal formed of that lamp seal of functionally gradient material.

Lamp and lamp package made of functionally gradient material

A high pressure mercury lamp in which formation and spreading of milky opacification in the fused silica glass forming the discharge vessel can be advantageously prevented, and thus a rapid decrease of screen illuminance prevented, when it is used as the light source of a liquid crystal projector and the like by, in a high pressure mercury lamp in which a discharge vessel of fused silica glass contains a pair of opposed tungsten electrodes, mercury in an amount that is at least equal to 0.16 mg/mm,, rare gas, and at least one halogen, and in which the wall load is at least equal to 0.8 W/mm,, the amount of mercury added being fixed in a range from 2&times;10,to 7&times;10,&mgr;mole/mm,, and/or the at least one halogen being in the form of a carbonless halogen compound, and/or the average OH radical concentration in an area of a wall of the discharge vessel at a depth of 0.2 mm from an inner surface of the wall of the discharge vessel being at most 20 ppm.

High pressure lamp with specific amount of mercury, halogen and wall loading

A low cost, compact heat roller device is provided which includes a heat generating resistance for increasing the temperature of the heat roller wherein the heat generating resistance is divided into two parts in order to correspond to passage widths of different recording materials. The heating power of one of these heat generating resistances is changed and the temperature increase of a non-paper transport area of the heat roller is suppressed. Specifically, the heat roller device includes a heat roller and a press roller opposite the heat roller, two heat generating resistances formed on an outer surface of the heat roller which generate heat independently of one another, a common electrode for supplying current and separately arranged additional supply electrodes. The time during which the respective heat generating resistance is on, is changed, in relative terms, according to the object to be heated, and thus the heating power is changed.

Heat roller device

A high pressure mercury lamp with an extremely high mercury vapor pressure and extremely high tube wall load in which the arc during operation is advantageously stabilized is achieved in a high pressure mercury lamp having a discharge vessel of fused silica glass which contains a pair of opposed tungsten electrodes, mercury in an amount at least equal to 0.16 mg/mm.sup.3 and a rare gas, and in which the discharge tube has a tube wall load at least equal to 0.8 W/mm.sup.2, by at least one metal halide with a metal having an ionization potential that is at most 0.87 times as high as the mercury ionization potential being added to the discharge tube in a range of from 2.times.10.sup.-4 to 7.times.10.sup.-2 .mu.mole/mm.sup.3.

Growing community of inventors

Gotenba, Japan

Hiroto Sato