Hamamatsu-photonics K.k.

Hiroto Sato

Takuya Homme

Toshio Takabayashi

Takaharu Suzuki

Yoshio Natsume

Kazuaki Okumura

Masahiro Suganuma

Mayumi Okumura, Legal Representative

Toshio Takabayahsi

Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

Scintillator panel

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Scintillator panel and radiation image sensor

A scintillator elementhas a rod-like base material, and a scintillatoris formed by being vapor deposited radially onto a side face of the base material. A plurality of these scintillator elementsare aligned and bundled together to form a scintillator unit. By mounting a solid-state image pickup elementto an open face of a caseof the scintillator unit, an image sensor M, which serves as a radiation detector, is formed. The image sensor M can be adjusted in size by adjusting the number, etc., of the scintillator elements

Scintillator element, scintillator unit, and radiation detector using the same

An organic film vapor deposition method includes a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from the vapor deposition table; a second step of introducing the vapor deposition table having the substrate supported by the target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of the substrate, provided with the scintillator, introduced into the vapor deposition chamber.

Organic film vapor deposition method

An auxiliary substrateis overlapped onto a thin substrate, and substrateand auxiliary substrateare covered with an organic film. Thereafter, a scintillatoris formed on a scintillator forming portionA of organic filmthat corresponds to substrate. Here, since thickness is added to substrateby auxiliary substrate, the warping of substrateis prevented and scintillatoris formed uniformly.

Scintillator panel and method of manufacturing radiation image sensor

Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.

Radiation detection device and method of making the same

A scintillator panel () comprises a radiation-transparent substrate(), aflat resin film () formed on the substrate (), a reflecting film () formed on the flat resin film (), a deliquescent scintillator () formed on the reflecting film (), and a transparent organic film () covering the scintillator ().

Scintillator panel, radiation image sensor, and methods of making the same

In a scintillator panel comprising a deliquescent scintillator formed on an FOP and a polyparaxylylene film covering over the scintillator, the FOP comprises a protective film peeling prevention rough at a side wall portion thereon coming into contact with the polyparaxylylene film.

The surfaces of an amorphous carbon substrate of a scintillator panel have undergone sandblasting, and an Al filmserving as a reflecting film is formed on one surface, and a columnar scintillator for converting incident radiation into visible light is formed on the surface of the Al film.

Organic film vapor deposition method and a scintillator panel

A light-receiving device array in which a plurality of light-receiving devices are one- or two-dimensionally arranged on a substrate, a scintillator layer is deposited on the light-receiving devices and provided with columnar crystals, and an organic film is formed over the scintillator layer and there outside region of the substrate and it intrudes into gaps among the top part of the columnar crystals to cover the scintillator layer.

A radiation detection device includes a light-receiving device array with a plurality of light-receiving devices arranged on a substrate to form a light-receiving portion and a plurality of bonding pads electrically coupled to the light-receiving devices of the light-receiving portion to form a bonding pad portion. A scintillator layer is deposited over at least a portion of the light-receiving devices for converting radiaton into detectable light. A radiation-transmitable, moisture-resistant protective film covers at least the scintillator. A coating resin is located in proximity to a periphery of the moisture-resistant prptective film, with the periphery of the moisture-resistant protective film being fixed to the light-receiving device array with the coating resin.

The surfaces of an amorphous carbon substrateof a scintillator panelhave undergone sandblasting, and an Al filmserving as a reflecting film is formed on one surface. A columnar scintillatorfor converting incident radiation into visible light is formed on the surface of the Al film

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Hamamatsu, Japan

Hiroto Sato