Canon Kabushiki Kaisha

Canon Optron Inc.

Hiroto Numazawa

Motokazu Kobayashi

Minako Nakasu

Yoshihiro Ohashi

Toshio Tomiyoshi

Youichi Fukaya

Takanori Watarai

Yukihiro Horie

Takahiro Tamekuni

Soichiro Ueshima

Disclosed is a method of manufacturing a piezoelectric substrate, the method including: forming an intermediate layer of Ti and a lower electrode of Pt oriented in a (111) axis direction on a substrate without heating the substrate; applying a coating liquid for forming an orientation control layer made of lead titanate onto the lower electrode; drying the coating liquid at a predetermined temperature to form an orientation control layer precursor made of lead titanate; applying a coating liquid for forming a piezoelectric thin film made of lead zirconate titanate; drying the coating liquid at a predetermined temperature to form a piezoelectric precursor made of a lead zirconate titanate precursor; and collectively firing the orientation control layer precursor and the piezoelectric precursor to crystallize both the precursors, to thereby form a piezoelectric thin film made of lead zirconate titanate preferentially oriented in a (110) plane.

Piezoelectric substrate and method of manufacturing the piezoelectric substrate, and liquid ejection head

A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiOon the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1&#xb0; or more.

Piezoelectric actuator, method for manufacturing same, and liquid discharge head

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Yuki, Japan

Hiroto Numazawa