Ngk Insulators, Inc.

Hiroto Matsuda

Kazuhiro Nobori

Yutaka Mori

Yasufumi Aihara

Shigeru Hanzawa

Mitsuyoshi Watanabe

Tetsuya Kawajiri

Akira Narukawa

Yasuyoshi Imai

Kouzi Fusimi

Tsutomu Kato

A ceramic member is provided including a base including an alumina sintered body, an yttria sintered body formed on the alumina sintered body, an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body, and a metallic member buried in the intermediate layer of the base. A difference between the thermal expansion coefficient of the alumina sintered body and that of the yttria sintered body is equal to or less than about 0.50&#xd7;10/K, and the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body. The alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body, and the content of yttria in the yttria sintered body is 99 wt % or more.

Ceramic member and manufacturing method for the same

An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2&#xd7;10/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.

Alumina member and manufacturing method thereof

A manufacturing method for a sintered body having a metallic member buried therein is provided, and includes forming an alumina sintered body, forming a metallic member by printing a printing paste including a refractory metal on the alumina sintered body, forming a green alumina compact on the metallic member, and sintering the alumina compact, the metallic member, and the alumina sintered body or the alumina presintered body.

Manufacturing method for sintered body with buried metallic member

A yttria sintered body contains an amount of silicon carbide within a range of 5 to 40% by volume, has a volume resistivity at room temperature within a range of 1&#xd7;10to 1&#xd7;10&#x3a9;&#xb7;cm, and is adapted for application to an electrostatic chuck.

Yttria sintered body, electrostatic chuck, and manufacturing method of yttria sintered body

An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1&#xd7;10&#x3a9;&#xb7;cm at room temperature and a volume resistivity equal to or greater than about 1&#xd7;10&#x3a9;&#xb7;cm at 300&#xb0; C., and an electrode formed on one surface of the dielectric ceramic layer.

Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

A binder is mixed to alumina powder with a purity of 99.5% or more (step S), the mixture is granulated (step S), resultant granule powder is formed with a die (step S), and a formed compact is sintered in a hot-pressing manner (step S).

Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method

A yttria sintered body is provided which includes yttria as a principal ingredient and 5 to 40 vol. % silicon nitride, and which exhibits enhanced corrosion resistance and mechanical strength.

Yttria sintered body, ceramic member using yttria sintered body, and manufacturing method of yttria sintered body

A method of manufacturing an electrical-resistance heating element includes forming sintered ceramics or calcined ceramics, forming an electrode on the sintered ceramics or the calcined ceramics, and forming a ceramic base material having mainly a high melting point metal on the electrode embedded therein, thereby forming a heating element with built-in electrode.

Method of manufacturing electrical resistance heating element

Method of removing a layer of glass formed on a sintered body which is manufactured by hot isostatic pressing of a preformed body of inorganic powder (e.g., silicon nitride powder and silicon carbide powder) in a pressure medium at a sintering temperature, wherein the sintered body of inorganic powder is retained in alkali solution at a high temperature for a predetermined time, preferably under a predetermined pressure.

Removal method of glass adhered to sintered object during hot isostatic

A sintered silicon nitride contains at least 90% of .beta.-type silicon nitride, wherein said .beta.-type silicon nitride consists essentially of 35 to 80% of large crystal particles with the remainder of small crystal particles, said large crystal particles having a mean particle length being at least two times as long as that of said small crystal particles. This sintered silicon nitride is obtained by a method wherein one batch of starting silicon nitride powders, whose primary particles have a mean particle size of 0.1 to 0.5 .mu.m, and another batch of starting silicon nitride powders, whose primary particles have a mean particle size of 0.5 to 0.7 .mu.m, are blended with a sintering aid or aids at a given weight ratio, and the thus obtained blend is formed or compacted and sintered.

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Ogaki, Japan

Hiroto Matsuda