Daihen Corporation

Hirotaki Takei

Hiroyuki Kotani

Yoshifumi Ibuki

Hiroaki Oichi

A high-frequency power supply system includes an anomaly detectorwhich detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source. The anomaly detectorincludes a first detectorwhich detects a voltage value Vf of a high-frequency forward wave, a second detectorwhich detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculatorand a differentiatorwhich calculate a reflection coefficient differential value d&#x393;/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determinerwhich determines of an occurrence of an anomaly based on the reflection coefficient differential value d&#x393;/dt. When the anomaly detectoroutputs an anomaly detection signal to the high-frequency power source, high-frequency power sourcestops its power output operation.

Growing community of inventors

Osaka, Japan

Hirotaki Takei