Sumco Techxiv Kabushiki Kaisha

Hirotaka Katou

Hideyuki Matsunaga

Kazuhiro Narahara

Yuichi Nasu

A method and an apparatus for manufacturing a semiconductor wafer are provided for improving a quality of the semiconductor wafer, and further, for improving a quality of a semiconductor device manufactured by using the semiconductor wafer, by preventing warping from being generated at a stage of a placing step, at the time of performing heat treatment to a semiconductor wafer substrate. The placing process is performed by a placing means so that a time when a temperature difference between a wafer front surface temperature and a wafer rear surface temperature becomes maximum, and a time when warping is generated in the wafer are prior to a time when the wafer is brought into contact with lift pins or a susceptor (i.e., a time after the temperature is at an upper limit value of an infrared temperature region at 600&#xb0; C.), and the lift pins are brought into contact with the wafer rear surface.

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Kanagawa, Japan

Hirotaka Katou