Tokyo Shibaura Electric Co., Ltd.

Hirosuke Ohshio

Masashi Kamiya

Katsunobu Ueda

Tameyasu Tsukada

Yoshinaga Moriwaki

Masaharu Terashima

Tetsuo Aikawa

A precise feeding table apparatus which comprises an XY-table assembly including a Y-table and an X-table mounted thereon. Electric motors for supplying a driving force to feed the X- and Y-tables are set on a base of the table apparatus. A driving shaft of the electric motor for the Y-table takes the form of a ball screw to cause a guide carriage supported by the driving shaft to make a minute reciprocation. A moment derived from the reciprocation of the guide carraige is not directly transmitted to the Y-table. A connection rod moving jointly with the guide carriage is connected to an output shaft fitted to the Y-table by means of a coupling including a fluid bearing. The fluid bearing supports the connecting rod in contactless relationship, thereby preventing the vibrations and moments of the connecting rod from being transmitted to the output shaft.

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Yokohama, Japan

Hirosuke Ohshio