Matsushita Electric Industrial Co., Ltd.

Hirosuke Mikami

Hiroshi Sakakima

Hideki Kuwajima

Masayoshi Hiramoto

Hirokazu Uchiyama

Hiroyasu Tsuji

Yasuhiro Iwano

A method comprises: bonding a plurality of thin film piezoelectric elements, formed on a substrate, onto a temporary fixing substrate via an adhesive layer; selectively removing the substrate to expose the thin film piezoelectric elements; fixing an element housing jig having sectional regions for individually isolating the thin film piezoelectric elements in such manner that the thin film piezoelectric elements and the sectional regions correspond to each other; and dissolving and removing the adhesive layer, and housing the thin film piezoelectric elements in the sectional regions of the element housing jig. Accordingly, it is possible to individually isolate and house the thin film piezoelectric elements removed from the substrate.

Method of manufacturing thin film piezoelectric element, and element housing jig

The present invention provides a magnetic film expressed by a composition formula T M X N O (T is a magnetic metal such as Fe, M is an alkaline earth metal such as Be, Mg, and Ca, and X is at least one selected from the group consisting of Y, Ti, Zr, Hf, V, Nb, Ta and lanthanoid), where a&plus;b&plus;c&plus;d&plus;e&equals;100, 45 &lE;a&lE;85, 5.5&lE;b&lE;28, 0.5&lE;c&lE;16, 6&lE;b&plus;c&lE;28.5, 0.4 <b/c &lE;56, 0&lE;d&lE;10, and 8&lE;d&plus;e&lE;40. The magnetic film comprises mainly metal magnetic crystal grains having an average crystal grain diameter of not more than 15 nm and a grain boundary product. The grain boundary product substantially separates the metal magnetic crystal grains. The main component of the metal magnetic crystal grains is the T. The grain boundary product contains at least an oxide or a nitride of the M and the X. The magnetic film has a saturation magnetic flux density of not less than 0.8 T and an electric resistivity of not less than 80 &mgr;&OHgr;cm.

High resistance magnetic film

Growing community of inventors

Osaka, Japan

Hirosuke Mikami