Powerchip Semiconductor Manufacturing Corporation

Hiroshi Yoshida

Shou-Zen Chang

Ming-Han Liao

Min-Cheng Chen

A 3D monolithic stacking memory structure is provided in the present invention, including a semiconductor substrate, a field effect transistor (FET) on the semiconductor substrate, a plurality of back-end metal layers on the FET and the semiconductor substrate, an oxide-semiconductor FET (OSFET) in the back-end metal layers, wherein a drain of the OSFET is connected with a gate of the FET, and a FEMIM storage capacitor formed on the back-end metal layers, wherein a bottom electrode of the FEMIM storage capacitor is connected with the drain of the OSFET and the gate of the FET, and the FET, the OSFET and the FEMIM storage capacitor are stacked in order from bottom to top on the semiconductor substrate.

3D monolithic stacking memory structure with oxide-semiconductor field effect transistor and ferroelectric metal-insulator-metal storage capacitor

A high-voltage MOS transistor includes a semiconductor substrate, a plurality of active regions, a gate insulation layer, and a gate electrode. The active regions are defined by an isolation structure, wherein the active regions include a channel portion and two side portions, the channel portion has first opposite sides and second opposite sides, and the two side portions are at the first opposite sides of the channel portion. The gate insulation layer is disposed on a surface of the channel portion. The gate electrode is disposed on the gate insulation layer and extending on a portion of the isolation structure, wherein the gate electrode includes a pair of channel edge openings and a plurality of slits. The pair of channel edge openings are at the second opposite sides of the channel portion to expose a portion of the gate insulation layer, and the slits are disposed over the channel portion.

High-voltage metal-oxide-semiconductor transistor

A ferroelectric memory structure including a substrate, a ferroelectric capacitor structure, and a switch device is provided. The ferroelectric capacitor structure is disposed on the substrate. The ferroelectric capacitor structure includes at least one first electrode, first dielectric layers, a second electrode, and a ferroelectric material layer. The at least one first electrode and the first dielectric layers are alternately stacked. The second electrode penetrates through the first electrode. The ferroelectric material layer is disposed between the first electrode and the second electrode. The switch device is electrically connected to the ferroelectric capacitor structure.

Ferroelectric memory structure

A ferroelectric memory structure including a first conductive line, a second conductive line, and a memory cell is provided. The second conductive line is disposed on the first conductive line. The memory cell is disposed between the first and second conductive lines. The memory cell includes a switch device and a ferroelectric capacitor structure. The switch device is disposed between the first and second conductive lines. The ferroelectric capacitor structure is disposed between the first conductive line and the switch device. The ferroelectric capacitor structure includes ferroelectric capacitors electrically connected. Each of the ferroelectric capacitors includes a first conductive layer, a second conductive layer, and a ferroelectric material layer. The second conductive layer is disposed on the first conductive layer. The ferroelectric material layer is disposed between the first conductive layer and the second conductive layer. The ferroelectric material layers in the ferroelectric capacitors have different top-view areas.

Ferroelectric memory structure with different ferroelectric capacitors

A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a first electrode layer disposed on the substrate, a gate electrode layer disposed on the first electrode layer, a second electrode layer disposed on the gate electrode layer, an oxide semiconductor layer penetrating through the gate electrode layer, a gate dielectric layer disposed between the gate electrode layer and the oxide semiconductor layer, a first insulating layer disposed between the gate electrode layer and the first electrode layer, and a second insulating layer disposed between the gate electrode layer and the second electrode layer. The oxide semiconductor layer is in direct contact with the first electrode layer and the second electrode layer, respectively.

Semiconductor device and method of manufacturing the same

An oxide semiconductor-based FRAM is provided in the present invention, including a substrate, a word line on the substrate, a gate insulating layer on the word line, an oxide semiconductor layer on the gate insulating layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain further connect respectively to a plate line and a bit line, a ferroelectric dielectric layer on the source, the drain and the oxide semiconductor layer, and a write electrode on the ferroelectric dielectric layer, wherein the write electrode, the ferroelectric dielectric layer, the oxide semiconductor layer, the gate insulating layer and the word line overlap each other in a direction vertical to the substrate.

Oxide semiconductor-based FRAM

An oxide semiconductor based FRAM is provided in the present invention, including a substrate, a write electrode on the substrate, a ferroelectric dielectric layer on the write electrode, an oxide semiconductor layer on the ferroelectric dielectric layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain are further connected to a plate line and a bit line respectively, a gate insulating layer on the source, the drain and the oxide semiconductor layer, and a word line on the gate insulating layer, wherein the word line, the oxide semiconductor layer, the ferroelectric dielectric layer and the write electrode overlapping each other in a direction vertical to the substrate.

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Hsinchu, Taiwan

Hiroshi Yoshida