Shinko Electric Industries Co., Ltd.

Philtech Inc.

Hiroshi Yonekura

Koki Tamagawa

Yuji Furumura

Naomi Mura

Tadayoshi Yoshikawa

Miki Saito

Akihiro Kuribayashi

Hidehiro Komatsu

Kazuyuki Ogura

A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate (e.g., the temperature of the substrate or the amount of charge stored in the substrate) flows through the coil.

Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus

A substrate temperature regulation fixed apparatus has a base substance on which a vacuumed object is placed, an adhesive layer and a base plate. The base substance is fixed on the base plate through the adhesive layer. The adhesive layer contains a substance having plasma resistance.

Substrate temperature regulation fixed apparatus

An electrostatic chuck has a structure in which a heater is sandwiched between a base member and an electrostatic chuck substrate, the heater being bonded to the base member with an adhesive layer interposing therebetween. The adhesive layer interposing between the heater and the base member has a structure in which a first adhesive layer and a second adhesive layer are stacked, the first adhesive layer being formed by curing an adhesive having high thermal conductivity, the second adhesive layer being formed as gel by curing an adhesive having lower viscosity than the adhesive of the first adhesive layer. Preferably, the first and second adhesive layers are both made of a silicone-based resin.

Electrostatic chuck

An electrostatic chuck includes a dielectric layerformed with an attraction and fix face onto which a plate memberis attracted and fixed, wherein the attraction and fix face of the dielectric layeris formed with a plurality of projection partseach with only a tip face abutting the plate memberformed as a flat face by grinding and formed with a coolant gas flow pathwhere a coolant gas flows is opened to the flat face of each of the projection parts

Growing community of inventors

Nagano, Japan

Hiroshi Yonekura