Hitachi, Ltd.

Hitachi-high-technologies Corporation

Japan Atomic Energy Research Institute

Tohnichi Mfg. Co., Ltd.

Kabushiki Kaisha Toshiba

Sumitomo Electric Industries, Limited

Mitsubishi Denki Kabushiki Kaisha

Fuji Electric Co., Ltd.

Tonichi Manufacturing Co., Ltd.

Canon Kabushiki Kaisha

Hitachi Touhoku Software, Ltd.

Hiroshi Tsuji

Toshinari Ando

Hisao Mase

Satoshi Wakayama

Shunsuke Akifuji

Yoji Taniguchi

Toyozo Aoyama

Masaki Mizuochi

Shoichi Masui

Tetsuya Masuishi

Seiji Ito

Hiroshi Majima

Takashi Saito

Kyoichi Komatsu

Michiko Oba

Hirohide Haga

Tamayo Tokuda

Tadahiro Kiyama

Osamu Tsuji

Shuichi Nakagawa

Masataka Nishi

Chizuko Yasunobu

Yasuharu Namba

Tetsuji Toge

Ichiro Tachibana

Yoshimasa Fukushima

Susumu Shimamoto

Yuichi Yamada

Tomohiro Ogata

Toshiaki Sakaguchi

Hiroshi Kinukawa

Yukio Yasukawa

Shozo Aikawa

Takaaki Isono

Hideki Tanaka

Yasunari Sohda

Kenichi Takahashi

Norifumi Nishikawa

Naomasa Suzuki

Yoshikazu Takahashi

Takeshi Kato

Kunio Harada

Masanori Watanabe

Naoki Ayai

Nobuyoshi Kobayashi

Yasuhiro Someda

Hideo Ohata

Kenichi Yoshida

Kazuhiko Hayashi

Mitsuru Inoue

Akira Nishioka

Norio Saitou

Hironori Ogawa

Akira Yamamoto

Masahiro Koyama

Hidetoshi Satoh

Yuji Kato

Motohiro Takahashi

Akira Mikumo

Sayaka Tanimoto

Kouji Inoue

Masaru Matsushima

Katsunori Onuki

Tadashi Hirose

Yoshiaki Yoshikawa

Naoma Ban

Takashi Sato

Yasuhide Mori

Eisuke Tada

Yoichi Sugimori

Maki Mori

Kiyotsugu Mizouchi

Kouji Ishiguro

Nobuo Shibata

Takaaki Yamada

Hideo Nakajima

Akihiko Koga

Atsushi Aoki

Yoshiaki Hattori

Daisuke Muto

Kenzo Moriyama

Masamitsu Naganuma

Tsutomu Fujinami

Naoya Masuda

Shuji Kitazawa

Koichi Shimura

Ryoichi Shibuya

Michiaki Kimura

Takafumi Hosokawa

Kizen Sakaki

Masayuki Konno

Kazuya Hamada

Kyo Kan

Masanobu Nozawa

Takahashi Matsui

Susuma Shimamoto

Kenji Tozuka

Keiichiro Renge

Shuzo Tomohiro

Shiro Hino

A tensioning device is configured to apply upward tension to a bolt-nut fastener including a bolt fitted with a fastened member H, and a nut to be fastened to a shaft of the bolt, which protrudes from the fastened member. A first male thread portion is formed on an outer circumferential surface of the nut. The tensioning device includes a connection member having a first female thread portion to be engaged with the first male thread portion, a tensioning mechanism for tensioning the nut via the connection member in a state where the first male thread portion is engaged with the first female thread portion, and a tension bearer which is disposed around an outer circumference of the connection member, and bears a reaction force applied from the fastened member H in tensioning performed by the tensioning mechanism.

Tensioning device

To provide a tensioning device capable of tensioning a bolt from a bolt head side while suppressing increase in the number of components. A tensioning device is configured to apply upward tension to a bolt fastened to a fastened member H. A first male thread portion is formed on an outer circumferential surface of a head of the bolt. The tensioning device includes a connection member having a first female thread portion to be threadly engaged with the first male thread portion, a tensioning mechanism for tensioning the bolt via the connection member in a state where the first male thread portion is threadly engaged with the first female thread portion, and a tension bearer which is disposed around an outer circumference of the connection member, and bears a reaction force applied from the fastened member H in tensioning performed by the tensioning mechanism.

An error of an axial force detection is reduced by tensioning a bolt with a tensioning device engaged with a part of the bolt, different from a shaft portion of the bolt. A tensioning device is configured to apply upward tension to a bolt fastened to a fastened member H, and fitted with a washer. A first male thread portion is formed on an outer circumferential surface of the washer. The tensioning device includes a connection member having a first female thread portion to be engaged with the first male thread portion, a tensioning mechanism for tensioning the connection member in a state where the first male thread portion is engaged with the first female thread portion, and a tension bearer which is disposed around an outer circumference of the connection member, and bears a reaction force applied from the fastened member H in tensioning performed by the tensioning mechanism.

The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.

Stage apparatus, and charged particle beam apparatus using same

It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.

Linear motor, movable stage and electron microscope

A torque wrench equipped with a cam-type torque detection mechanism is provided which is capable of detecting a torque with high accuracy, providing a non-unusual-feeling of handle operation after torque has been detected, and enabling tightening of fastened members such as bolts with safety. In a torque wrench equipped with the cam-type torque detection mechanism, a cam portionformed on the outer circumference of a tubular camincludes: a static engagement cam surfacewith which a roller memberin a static status engages in a non-operated status; a gradually increasing torque peak cam surfacewhich is connected to the static engagement cam surfaceand with which the roller memberis brought into contact while moving to thereby gradually increase the torque peak value; a cam top surfaceforming the cam top portion continued to the gradually increasing torque peak cam surface; a gradually decreasing torque cam surfacefor gradually decreasing a plus torque to the roller memberto zero; and a minus torque cam surfacefor imparting a minus torque to the roller memberhaving passed over the gradually decreasing torque cam surface

Torque wrench

Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table.

Sample positioning apparatus, sample stage, and charged particle beam apparatus

A charged particle radiation device includes a sample chamber in which a sample stage adapted to mount a sample is installed, a charged particle radiation irradiation section adapted to irradiate the sample with a charged particle radiation to observe and fabricate the sample, sidewalls installed on a periphery of the sample chamber and the charged particle radiation irradiation section, a ceiling board installed on a plane located in an upper part of the sidewalls, and a sound absorbing structure section disposed below the ceiling board, and including a plurality of hole sections and a hollow section communicated with the hole sections. The sound absorbing structure section has an absorption band including a frequency band of a standing wave generated in a space surrounded by the sidewalls and the ceiling board. Further, a soundproof cover may include the sidewalls, ceiling board and sound absorbing structure.

Charged particle radiation device and soundproof cover

Provided is a charged particle radiation device enabling suppression of both inclination and vertical vibration of a charged particle optical lens barrel, with a simple configuration. A charged particle radiation device according to the present invention includes a vibration damping member () including viscoelastic material sheets (A andB) sandwiched by support plates (A andB), and is configured so that a plane including a sheet surface of each viscoelastic material sheet is not perpendicular to a center axis of the charged particle optical lens barrel.

Charged particle radiation device

Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber () for disposing a sample () therein, a charged particle radiation optical lens tube () for irradiating the sample () with charged particle radiation (), ion pumps () for evacuating the charged particle radiation optical lens tube (), a frame () fixedly attached to the sample chamber (), the frame () facing one end of each of the ion pumps (), and vibration absorbers provided between the frame () and the one end of each of the ion pumps (), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet () sandwiched between metal plates ().

To make improvements in torque wrenches with a torque limiter that uses a cam mechanism and to provide a torque wrench that realizes more stable operation and is capable of highly precise tightening. In a torque wrench with a torque limiter that uses a cam mechanism, a solid columnar roller memberis engaged with a cam partof a cam shaftsuch that it is rotatably supported by a roller support lever membermounted in a head portionsuch as to be rotatable around a support shaftand such that it is pressed against the cam partby a spring force transmitting rodbiased by a torque setting spring. The roller support lever memberis configured such that the distance rfrom the support shaftto a point of application of force of the spring force transmitting rodis longer than the distance rfrom the support shaftto the roller member

An object of this invention is to provide a charged particle beam apparatus that can easily evaluate the stability of a position that is irradiated with a charged particle beam. To achieve the above object, this invention includes a detector that scans a charged particle beam and detects secondary particles that originate from a substrate, and an image processer that displays an image of the substrate on a display based on the secondary particles that are detected by the detector. The image processer is configured to display on the display any two or more members of the group consisting of a scanning image produced by the charged particle beam of the substrate, a wave in time domain showing fluctuations of the irradiation position of the charged particle beam on the substrate, and a power spectrum of the wave in time domain.

Charged particle beam apparatus and displacement detecting circuit

An LNG (liquefied natural gas) power plant has a heating/cooling device. The heating/cooling device is controlled by a command generated by a temperature control device. The temperature control device receives a heating value and a temperature of the fuel gas. The heating value of the fuel gas introduced to a gas turbine power generation unit from an LNG vaporization facility is detected by a heating value detector. The temperature of the fuel gas is detected by a temperature detector. A target temperature calculator installed in the temperature control device calculates a target temperature based on the heating value. A command generator installed in the temperature control device generates the command by comparing the target temperature and the fuel temperature.

LNG power plant

To achieve high-resolution lithography, the temperature of a sample is controlled with heater wires during electron-beam lithography, the adverse effect of a magnetic field induced by the heater current is suppressed. Namely, heater wires are used to control the temperature of a sample so that the temperature will be maintained constant. In order to minimize the adverse effect of a magnetic field during the passage of currents through the heater wires, two heater wires are layered with the arrangement of the upper and lower sides, currents are fed to flow through the heater wires in mutually opposite directions, and the ratio of the current flowing through the upper heater wire to the one flowing through the lower heater wire is slightly changed from zero.

System and method for electron-beam lithography

An electron beam lithography apparatus of the present invention prevents the electron beam trajectory from being affected by a leakage magnetic field from a permanent magnet which is used as a sample stage guide/driving mechanism. In this electron beam lithography apparatus, an air bearing guide is used as a sample stage guide mechanism, and the stage posture is held by attracting the stage floating on a surface plate to the surface plate side by the permanent magnet. To avoid the leakage magnetic field from the permanent magnet from affecting the electron beam irradiation position on the sample, the permanent magnet is magnetically shielded by a shield member. In addition, to reduce variations in magnetic field above the sample, which are generated when the shield member moves in a leakage magnetic field from the electron lens, another shield member is arranged under the electron lens.

Electron beam lithography apparatus

Growing community of inventors

Tokyo, Japan

Hiroshi Tsuji