Mitsubishi Heavy Industries Limited

Canon Anelva Corporation

Mikuni Color Ltd.

Phyzchemix Corporation

Hiroshi Tonegawa

Hitoshi Sakamoto

Toshihiko Nishimori

Ikumasa Koshiro

Naoki Yahata

Yoshiyuki Ooba

Yuzuru Ogura

Hideaki Sakurai

Yasuharu Suda

Yasuhiro Akita

Minoru Sueda

Toyoshi Ohto

Yoshiyuki Tasaka

Kimihiko Ohya

Shuuichi Nagahata

In a metal film production apparatus, a copper plate member is etched with a Clgas plasma within a chamber to form a precursor comprising a Cu component and a Clgas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Clgas, and the Cl* is supplied into the chamber to withdraw a Clgas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.

Method and apparatus for production of metal film or the like

Interconnection structure

Disclosed are a printing plate precursor, a fabrication process of the printing plate precursor, a fabrication process of a printing plate, a regeneration process of the printing plate, a printing press, and a coating formulation for the printing plate precursor. According to the present invention, a printing plate can be fabricated directly from digital data, and sufficient image quality can be obtained without a developing step, i.e., a developer. To permit repeated use of the precursor, the precursor has a surface, which contains a photocatalyst and is capable of showing hydrophilicity when exposed to activating light having energy higher than band gap energy of the photocatalyst. A coating formulation&#x2014;which comprises fine particles of a thermoplastic resin having both a property that the particles unite to the surface when heated and a property that the particles decompose under action of the photocatalyst when exposed to activating light having energy higher than band gap energy of the photocatalyst&#x2014;is applied as a hydrophobizing agent onto the surface. At least a part of the surface of the precursor is heated such that the fine particles applied on the part of the surface are fixed to form a hydrophobic image area. The fine particles applied on the remaining part of the surface with the image area formed thereon are then removed.

Coating formulation for printing plate precursor, printing plate precursor, printing press, fabrication process of printing plate, and regeneration process of printing plate

Growing community of inventors

Yokohama, Japan

Hiroshi Tonegawa