Fujitsu Corporation

Hiroshi Takigawa

Yuji Nishikawa

Satoshi Ueda

Akira Sawada

Hiroji Ebe

Junjiro Goto

Tetsuya Kochi

Tohru Maekawa

A cooling device of a laser diode array includes a stacking of a plurality of metal plate members formed with a branched groove pattern or apertures acting as a cooling water path, by a chemical etching process.

Method of making a cooling device of a planar light source

Fabrication of cooling device of a planar light source

Cooling device of a planar light source

A method and apparatus in which separate steps are used between feeding source gases and growing films in a process of chemical vapor deposition (CVD) for compound semiconductor films. In one embodiment, a CVD reactor chamber has a piston which can change the volume of the chamber to control the pressure of the source gases therein. After source gases are fed to the chamber having a substrate under the condition that no CVD takes place due to an insufficient vapor pressure, the chamber is kept closed for a few seconds, and then pressurized by the piston to start CVD. A typical result indicates that a Hg.sub.1-x Cd.sub.x Te (where x=0.2) film on a 3-inch CdTe wafer has only 1% (or .DELTA.x=0.002) inhomogeneity in composition.

Method for chemical vapor deposition of semiconductor films by separate

An infrared radiation (IR) detector includes a cold shield consisting of (a) a light shielding portion having a substrate made of an infrared transmissive material, an infrared absorbing layer formed on one surface of the substrate, a dielectric layer formed on the infrared absorbing layer and an infrared reflecting layer formed on the dielectric layer, and (b) an opening portion consisting of a substrate made of an infrared transmissive material and a dielectric layer formed on the one surface of the substrate. The substrate and the dielectric layer are connected and generally continuous between the light shielding portion and the opening portion. The IR detector also includes an infrared detector array having a detective area arranged just below the opening portion of the cold shield.

Infrared detector

Growing community of inventors

Kawasaki, Japan

Hiroshi Takigawa