Omron Corporation

Hiroshi Sugahara

Tanichi Ando

Tomoyoshi Aizawa

Koji Takizawa

Hatsumi Aoi

Michie Uno

Kazuyoshi Okaji

An evaluation device may include: a receiving unit that receives an image of the semiconductor substrate, the image captured by an imaging device provided on the semiconductor substrate manufacturing apparatus; a determination unit that determines, using a neural network, at least one value representative of a probability of a machine learning device outputting an erroneous output for the image, the machine learning device configured to: (i) receive the image of the semiconductor substrate, (ii) perform computation using the received image, and (iii) output information indicating the quality of the semiconductor substrate based on a result of the computation; and an output unit that outputs an output based on the at least one value representative of the probability. The neural network has been trained using: images of manufactured semiconductor substrates; and information indicating, for each one of the images, a level of erroneousness for an output from the machine learning device.

Evaluating quality of a product such as a semiconductor substrate

A driver state determination unit of a drive mode switching control device regularly or irregularly determines whether a driver's state is a state of being able to perform a driving operation in a manual drive mode. The drive mode switching control device determines whether an operation performed by the driver is an emergency override operation or a non-emergency override operation. The drive mode switching control device outputs a switching signal for switching an automatic drive mode to the manual drive mode when a determination result by the driver state determination unit immediately before detection of the emergency override operation is that a driver's state is a state of being able to perform a driving operation in the manual drive mode.

Drive mode switching control device, method and program

Growing community of inventors

Kyoto, Japan

Hiroshi Sugahara