Shimadzu Corporation

Hiroshi Oohara

Yoshihiro Ueno

Yusuke Tagawa

In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.

Radiation inspecting apparatus

The tomographic apparatus of this invention has an attenuation quantity calculating and adjusting unit, a filter length calculating unit, an attenuation correction function calculating unit and a transmission length calculating unit in an arithmetic processing unit. Thus, sectional images with a beam hardening correction can be acquired. The beam hardening correction can be made without using an iterative method. The attenuation correction function calculating unit calculates a correction function by approximating and expressing the correction function by a linear function linking, between two transmission lengths, ratios between measured attenuation quantities for two transmission lengths measured by an X-ray detector, and calculated attenuation physical quantities calculated and adjusted for these transmission lengths.

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Kyoto, Japan

Hiroshi Oohara