Jeol Ltd.

Dkk Corporation

Hiroshi Ohkubo

Masahiko Kuwata

Kazunaga Ohno

Yukio Hashizume

Toshiyoshi Watanabe

An X-ray analyzing apparatus according to the invention includes an excitation ray generator for applying an excitation ray onto a sample, and an X-ray detector which is sealed in a vacuum container along with a cooling device; a first X-ray passing layer, where a first gas exists, is provided in a path through which the characteristic X-ray generated from the sample travels to the X-ray detector; X-ray transmission windows are provided on the first X-ray passing layer and on the vacuum container so as that the characteristic X-ray can reach to the X-ray detector through the windows; the first and second X-ray transmission windows are separated from each other so as to provide a second X-ray passing layer therebetween; and the second X-ray passing layer is arranged to be a vacuum or a second gas is circulated through the second X-ray passing layer. According to this construction, it can be prevented that the first gas breaks into the vacuum container in which the X-ray detector is sealed; thus the deterioration of the cooling efficiency caused in that the vacuum condition in the vacuum container is decreasing prevented, so that the consuming amount of the cooling medium for use in cooling the X-ray detector can be reduced.

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Akishima, Japan

Hiroshi Ohkubo