Fujikin Inc.

Other

Tadahiro Ohmi

Hiroshi Morokoshi

Nobukazu Ikeda

Michio Yamaji

Keiji Hirao

Tsutomu Shinohara

Tetsuya Kojima

Shigeru Itoi

Eiji Ideta

Hiroyuki Fukuda

Yuji Kawano

Kosuke Yokoyama

Shigeaki Tanaka

Yukio Minami

Masayuki Hatano

Akihiro Morimoto

Ryosuke Dohi

Michio Kuramochi

Yoshikazu Tanabe

Takashi Hirose

Takahisa Nitta

Koji Kawada

Hisashi Tanaka

Naoya Masuda

Tadanobu Yoshida

Toshiro Nariai

Osamu Fukata

Michihiro Kashiwa

A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet are diffused by the gas-diffusing member and then come into contact with the platinum coating to enhance reactivity, thereby producing water. A temperature of the reactor is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.

Reactor for generating moisture

A method for facilitating fabrication of a coupling member includes a first step of boring one of upwardly open, passageways, a communication passageway and an auxiliary passageway in a body block, a second step of inserting a closure member into the auxiliary passageway, a third step of welding the closure member to the inner peripheral body portion defining the auxiliary passageway, and a fourth step of boring the other upwardly open passageway in the body block. The closure member is inserted in the second step so as to be positioned at least party in the portion where the other upwardly open passageway is to be formed.

Coupling member for use in fluid control apparatus and method of fabricating same

An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

Fluid control apparatus

A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.

Fluid control device

A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.

A device for tightening a plurality of threaded members at the same time with proper torque without necessitating a cumbersome procedure of rotating the members one by one through a specified small angle at a time and without unequivalent tightening of the members, the tightening device (1) comprises two rotary shafts (6) each provided at a forward end thereof with a wrench portion (8) fittable to the threaded member (44), motors (3) for individually driving the rotary shafts (6) and a control unit (9) for detecting the tightening torque of each threaded member (44) and controlling the motor (3) based on the detected value to ensure proper tightening, the control unit (9) checking the tightening torque of each threaded member (44) as to whether the torque is within a predetermined range and whether the difference in tightening torque between the threaded members (44) is within a predetermined range.

Tightening device

An annular recess is formed in an inner periphery defining a bolt shank bore and has fitted therein an annular elastic member having elasticity radially thereof and having an inside diameter smaller than the outside diameter of the shank of a bolt. The shank bore has at an intermediate part thereof a stepped portion so as to give an increased diameter to a bore portion from the intermediate part to one end of the bore, and a hollow cylindrical member for preventing the elastic member from slipping out is inserted in the shank bore from the bore end so as to form a clearance between the stepped portion and the preventing member, whereby the annular recess is formed.

Bolt retainer for members to be fixed together by the bolt

A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.

Couplings for fluid controllers

A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.

System for supervising piping work

A device for heating a fluid control apparatus comprises a tape heater disposed on at least one of opposite lateral sides of the fluid control apparatus, and a plurality of brackets each comprising a bottom wall fastened to a panel with a screw and at least one side wall for holding the tape heater in contact with a fluid controller. The bottom wall of each of the brackets is formed with a screw hole, and each bracket is attached to the panel and adjustable in position.

Device for heating fluid control apparatus

A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.

Shutoff-opening device

A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V') integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

Fluid control system and valve to be used therein

A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.

Growing community of inventors

Osaka, Japan

Hiroshi Morokoshi