Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Dainippon Screen Mfg. Co., Ltd. (1 from 1,306 patents)
1 patent:
1. 7927096 - Substrate support structure, heat treatment apparatus using same, first sheet-like object for use in the substrate support structure, method of manufacturing the substrate support structure, heat treatment apparatus, and substrate sucking method