Shin-etsu Polymer Co., Ltd.

Hiroshi Mimura

Junya Toda

Akihiro Hasegawa

Wataru Niiya

Osamu Ogawa

Satoshi Odashima

Toshitsugu Yajima

Katsuhiko Kato

Tsutomu Suzuki

Toshiyuki Kamada

Masaru Hagano

Kazumasa Onuki

Takashi Suda

Jyunya Toda

Naoto Watanabe

Retainer of a container for storing and shipping wafers

A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

Substrate storage container

There is provided a substrate storage containercapable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container, and an device positioning memberas the functional member including: an attachment parthaving a thick sectionformed in thickness equal to a wall member of a container bodyor a lidand a thin sectiondecreasing in thickness as it approaches toward an outer edge from the thick section; and a body partcoupled to the attachment part, the device positioning memberbeing disposed on the container bodyor the lidso that a first surfaceof the thick sectionis flush with an inner surface of the wall member.

Substrate storage container and method of manufacturing the same

A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.

[Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container () that is provided with: a container main body (), which stores a substrate (W), and which has at least one side open; and a removable cover body () capable of opening/closing an opening () of the container main body (). In the substrate storage container (), the inside of the container main body () is provided with a first holding section () having a first holding groove () for holding a rear portion of the substrate (W), the inner side of the cover body () is provided with a second holding section () having a second holding groove () for holding a front portion of the substrate (W), and at least the first holding groove () of the first holding section () is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.

To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container including a constitutive material, which includes a shell body, a door and an on-off valve, defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed spacethrough the shell body, the door and the on-off valve.

A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate.

To provide a storage container which can inhibit and prevent generation of dust due to the motions of an advancing and retracting element, whose door element can be formed with a reduced space and thickness and which can prevent contamination of the articles accommodated therein, the storage container includes a container bodyfor storing precision substrates, a door elementthat opens and closes the front of container bodyand a locking mechanismfor locking and unlocking door elementthat covers container body. Locking mechanismis constructed of a rotary platethat is supported by door element, a first advancing and retracting platethat, in accordance with the rotation of rotary plate, advances toward the peripheral wall of door elementwhen door elementis locked and retracts to the reference position inside door elementwhen door elementis unlocked; a second advancing and retracting platewhich is supported by the front end part of first advancing and retracting plate, and projects out from the peripheral wall of door elementand fits into an engaging recessof container bodywhen door elementis locked and returns from engaging recessof container bodytoward the door element when door elementis unlocked; a guide ribwhich makes the second advancing and retracting plateincline in the thickness direction of the door elementas the plate is being projected.

Storage container

A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

A storage container comprises: a container main body having an opening through which a stored object is placed in or taken out; a lid which fits the opening; a latch mechanism provided on the lid, the latch mechanism having a rotating body rotatably supported by the lid and a pair of longitudinally slidable latch arms operably connected to the rotating body; and a lock mechanism which locks the rotating body when the lid is bolted by the latch mechanism.

The precision substrate storage container includes a bottom plateremovably attached to the bottom of a container bodyin which a multiple number of semiconductor wafers are accommodated in alignment; a holderremovably supported on bottom plate; and a RFID system transponderheld in holder. Bottom plateincludes a base plateopposing the rear bottom of container bodyand a wall plateerected on base plate. The base plateis formed with a first supporting structurefor supporting holderthat is oriented in the horizontal direction and a second supporting structurefor supporting holderthat is oriented in the vertical direction so as to selectively change the position of holdertaking one of the two directions, longitudinal and transverse.

Precision substrate storage container

A substrate storage container comprises: a container casing having an aperture through which a plurality of substrates are placed in or taken out; a cover adapted to fit into the aperture of the container casing; a sealing gasket capable of elastic deformation provided between the container casing and the cover; and a retainer, mounted on the cover, capable of retaining the periphery of the substrates. The retainer has: a supporting body mounted on the inside face of the cover; a plurality of elastic pieces provided in elastically deformable fashion on the supporting body; and a block provided on each of the elastic pieces, the block retaining the periphery of one of the substrates. A relation 10.8&#xd7;w&#x3c;y&#x3c;34.3&#xd7;w is satisfied when a substrate retaining force of each of the elastic pieces is y [unit: N] and a weight per the substrate is w [unit: kg].

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Kawagoe, Japan

Hiroshi Mimura