Canon Kabushiki Kaisha

Hiroshi Maehara

Keiko Chiba

Hideo Kato

Shinichi Hara

Keita Sakai

Masami Tsukamoto

Yutaka Watanabe

Takeshi Miyachi

Makoto Ogusu

Yasuhiro Shimada

Takayuki Yagi

Ryuichi Ebinuma

Koichi Sentoku

Chieko Mihara

Haruhito Ono

Yoshihiko Kikuchi

Minoru Matsuda

Kenji Saito

Kenji Saitoh

Takashi Kato

Akira Miyake

Nobushige Korenaga

Minoru Yoshii

Noriyuki Nose

Seiji Takeuchi

Nobutoshi Mizusawa

Masao Sugata

Yasuaki Fukuda

Masatake Akaike

Hiroshi Osawa

Hidehiko Fujioka

Ryo Edo

Processes for producing and recycling resin composition, which comprises a biodegradable polymer and a biodegradable liquid crystalline polymer, are provided. Also, a process for recycling waste paper is disclosed.

Resin composition with biodegradable non-liquid-crystalline and liquid-crystalline polymers

An apparatus for handling a minute object such as a cell by using a holographic optical tweezers that comprises a laser light source, holographic platehaving a specified pattern to form a hologram with light emitted from the light source, and a transparent plate that holds a liquid including a minute object, wherein the holographic plateis irradiated with laser light emitted from the laser light source, and the laser light passed through the holographic plateis focused in a sample solutionheld on the transparent plateto form a hologram having a pattern according to the pattern of the holographic platein the sample solution

Apparatus for handling minute object

A novel resin is provided which is renewable with less energy. A process for renewing the resin is also provided. The present invention includes a polymer having the repeating unit represented by Structural Formula (1) below, and a process for producing the polymer: [&#x2014;P&#x2014;R&#x2014;](1). In the formula, Pindicates an addition polymer moiety having a continuous hydrocarbon chain as the skeleton containing no condensation system, and is a polymer or oligomer prepared by addition polymerization of one or more monomers having a double bond; R indicates a linking group constituted of a condensation system for linking the polymer moieties P; and n is a number of repeating units and is an integer of 2 or more.

Recyclable polymer and process for production thereof

There are provided a photosensitive resin composition containing at least a polymer compound having a sugar structure, which has at least two species of functional groups cleavable in the presence of an acid, and a photo acid generator generating an acid by radiation of an electromagnetic wave or a beam of an electrically charged particle, and in addition, a resist composition, a method for fabricating a patterned substrate for fabricating a semiconductor device and the like, and a device such as a highly integrated semiconductor and the like.

Photosensitive resin composition, resist composition, fabrication method for patterned substrate, and device

A reflection type mask includes a substrate on which a multi-layered film for reflecting X-rays is provided, a mask pattern which is formed on the multi-layered film for absorbing the X-rays, and a cover for protecting the mask pattern. The cover is detachably attached to the substrate.

Reflection type mask

A resin composition, which comprises a biodegradable polymer and a biodegradable liquid crystalline polymer. The resin composition is useful for producing molded resin articles having good recyclability.

Resin composition, method of molding the same, and method of recycling resin composition

The invention provides a decomposable resin composition, which is stable at the time of use and which quickly decomposes when discarded. According to the present invention, there is provided a resin composition comprising an agent generating an acid or a base upon response to light or heat together with a hydrolyzable and biodegradable resin. The decomposable resin composition can promote decomposition of the polymer by generating an acid or a base in the resin by carrying out light irradiation and/or a heat treatment at a desired time and can control the decomposition speed of the polymer by controlling the generation amount of an acid or a base.

Decomposable resin composition and method for producing the same

A novel resin is provided, which is renewable with less energy. A process for renewing the resin is also provided. The present invention includes a polymer having the repeating unit represented by Structural Formula () [&#x2014;P&#x2014;R&#x2014;](). In the formula, Pindicates an addition polymer moiety having a continuous hydrocarbon chain as the skeleton containing no condensation system, and is a polymer or oligomer prepared by addition polymerization of one or more monomers having a double bond; R indicates a linking group constituted of a condensation system for linking the polymer moieties P; and n is a number of repeating units and is an integer of 2 or more.

Recyclable polymer, process for production thereof, and recycling treatment thereof

This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrode structures which are arranged along the paths of a plurality of charged-particle beams and have pluralities of apertures on the paths of the plurality of charged-particle beams. At least one of the plurality of electrode structures includes a substrate having a plurality of apertures for transmitting the plurality of charged-particle beams, and a plurality of electrodes extending from the side surfaces of the plurality of apertures to the peripheries of the plurality of apertures. At least the surface of the substrate is insulated.

Electron optical system array, method of manufacturing the same, charged-particle beam exposure apparatus, and device manufacturing method

Photosensitive resin composition, resist composition, fabricating method for patterned substrate, and device

An optical system for forming an image of an object. The optical system includes an optical element, which is deformed by the weight thereof, and at least one optical member for preventing a change in optical performance of the optical system due to deformation of the optical element, when the optical element is provided in the optical system.

Optical system and optical instrument with diffractive optical element

In a projection aligner for illuminating a pattern on a mask with a luminous flux from a light source through an illumination system and projecting the pattern onto a wafer with a projection optical system, a titanium oxide (TiO ) film is provided on the surface of at least one optical unit in the projection aligner. Thus, contamination of the projection aligner can be reduced.

Illuminator, exposure apparatus, and method for fabricating device using the same

An exposure method for transferring a pattern of a mask onto a member to be exposed. The method includes the steps of making preparations for exposure while a protection cover is attached to the mask, executing alignment between the member to be exposed and the mask while the protection cover is detached from the mask, and executing exposure with X-rays while the protection cover is detached from the mask.

X-ray mask, and exposure method and apparatus using the same

In a method for manufacture of an optical element, a thin film is formed on a surface, such as a grating surface, an aspherical surface or a spherical surface, formed on a mold. Then, a substrate is bonded to the thin film. Subsequently, the thin film and the substrate are separated from the mold.

Growing community of inventors

Kanagawa, Japan

Hiroshi Maehara