Kyosan Electric Mfg. Co., Ltd.

Hiroshi Kunitama

Itsuo Yuzurihara

Ryosuke Ohma

Yu Hosoyamada

Satoshi Aikawa

Takuya Yoshida

Takeshi Fujiwara

Satoshi Kawai

Koichi Miyazaki

Ryota Suzuki

A power conversion device according to the present invention comprises a plurality of class-D amplifiers disposed in parallel. An ON/OFF operation of a switching element of a lead leg and a delay leg of each class-D amplifier is carried out by a phase shift control, in which an auxiliary current is supplied to the class-D amplifier on the basis of a voltage difference between output terminals of an upper and lower class-D amplifiers. The auxiliary current supplements the electric current flowing between the drain and the source of the switching element. Generation of a displacement voltage dv/dt on the switching element, and a displacement current di/dt in modulation waves generated by the displacement voltage are prevented, thus preventing erroneous turn-on of the switching element in the OFF state of the other side of the leg.

Power conversion device with current-auxiliary circuit

A switching module comprising: a GaN-FET mounted on a substrate; a driver circuit connected to a gate electrode of the GaN-FET via a gate resistor; and a driver power supply for supplying a drive voltage to the driver circuit. The driver circuit is configured such that a plurality of logic integrated circuits are connected in parallel.

Switching module

The switching module has, mounted on a substrate thereof, a MOSFET and a driver circuit for applying drive voltage to a gate electrode of the MOSFET. In the switching module according to the present invention, the driver circuit is electrically connected to the MOSFET via a damping adjustment element and a bonding wire between the gate electrode and the driver circuit.

Provided is multi-phase interleaving control in a power supply device, the control allowing the pulse widths &#x394;T of respective phases to overlap one another, so as to be adaptable to wideband pulse power control. In applying dead beat control to the multi-phase interleaving, constant current control is performed using combined current of the respective phase current values, and the pulse widths &#x394;T(k) is computed under this constant current control, thereby preventing variation of the pulse widths &#x394;T(k) between the phases, and achieving stable power control. Accordingly, the pulse power control becomes adaptable to wideband. Furthermore, wideband control is possible also in two-level pulse power control that performs control by switching at high frequency between High-level power and Low-level power.

Power supply device and method for controlling power supply device

To suppress a leakage current flowing through a parasitic capacitor of an insulated transformer of a high-side insulated power. The present invention suppresses a common mode current using a common mode reactor by focusing on the fact that a leakage current flowing through a parasitic capacitor of an insulated transformer of a high-side insulated power source resulting from a high-frequency signal generated due to an on/off operation of a high-side switching element is the common mode current. The common mode reactor reduces the common mode current and bears the high-frequency signal to prevent the high-frequency signal from being applied to the insulated transformer of the high-side insulated power source, suppress the leakage current flowing through the parasitic capacitor of the insulated transformer, and reduce an erroneous operation of the high-side switching element generated due to the leakage current flowing through the parasitic capacitor of the insulated transformer.

Insulated power source and power conversion device

Provided is multi-phase interleaving control in a power supply device. In power control by the power supply device where the dead beat control is applied to the multi-phase interleaving, combined current of the multi-phase current values is used as control current in the multi-phase control based on the multi-phase interleaving, thereby achieving control independent of the number of the detectors and the control system independent of the number of phases, and further, this control current is used to perform constant current control, so as to prevent overshooting and undershooting. The power supply device has multi-phase interleaving control that performs multi-phase control using a plurality of phase current values, provided with an LC chopper circuit constituting a step-down chopper circuit that operates according to the multi-phase control of multi-phase interleaving, and a controller for performing step response control according to the multi-phase control of the LC chopper circuit.

Multi-phase interleaving control in a power supply device is accelerated. In addition, in accelerating the multi-phase interleaving control in the power supply device, acceleration in detecting a feedback signal and stabilization of a control system in a high-frequency band are promoted. Eliminating the need of the feedback signal according to a slow response detector, and using a detection signal obtained by a detector for detecting an AC signal capable of rapid response, thereby accelerating the multi-phase interleaving control in the power supply device. Then, the control system is stabilized, by satisfying a condition where gain is equal to 1 or less in a transfer function of the control system including an LC circuit, and a condition where a phase shift caused by dead time of switching time does not affect the sampling cycle.

Power supply device and method for controlling the multi-phase interleaving operation of the power supply device

Multi-phase interleaving control of a power supply device is accelerated. Furthermore, in accelerating the multi-phase interleaving control in the power supply device, detection of feedback signal is accelerated. In the power supply device and a method for controlling the power supply device, output voltage is acquired as an operation result of a discrete time process using an initial value of the output voltage at a predetermined point, and a detection value of capacitance current at each point of the discrete time process. Accordingly, only detection of the initial value is performed when the output voltage being slow in response is acquired, and detection performed in the discrete time process can be accomplished by detection of capacitance current being rapid in response, thus enabling rapid response.

A chopper section of a power supply device includes a plurality of step-down chopper circuits, and multiphase control of the step-down chopper circuits is performed using gate signals having phases displaced from each other. This shortens the period with which output signals of the step-down chopper circuits are changed. Shortening the period reduces the amount of jitter resulting from a gap between the occurrence of a command signal and a sampling point that is a point in time at which a gate signal is generated. The number of phases of the gate signals equals the number of phases of the step-down chopper circuits. The control of the gate signal generator is asynchronous to feedback control by the controller. Points in time (sampling points) at which gate signals are generated are points in time of generation (sampling points) after a point in time at which the controller calculates a manipulated value.

In a configuration of an isolation circuit using a transformer of a high-frequency-isolation gate driver circuit in the frequency band from 1 to 100 MHz, a period for resetting the exciting current is eliminated, generation of self-resonance phenomenon after resetting is cancelled to reduce generation of noise current, and malfunctions of the switching element due to noise is prevented. In driving plural gate circuits by RF signals, exciting current is allowed to pass through a primary coil of a gate driver transformer alternately in both directions continuously all the time, in a configuration for isolating drive input signals by the gate driver transformer. Accordingly, the reset period that is required when the exciting current flows only in one way becomes unnecessary, and thus generation of self-resonance phenomenon after resetting is canceled. Then, generation of noise current caused by the self-resonance phenomenon is reduced.

High-frequency-isolation gate driver circuit and gate circuit driving method

When RF power is supplied from an RF generator to a load via a power supply unit,

High-frequency power supply device and ignition voltage selection method

In an RF power supply for supplying RF power to a plasma load, reflected wave power control is performed in which the reflected wave power of an RF generator is detected and the RF generator is controlled. For a short-time variation in reflected wave power, control is performed based on a peak value variation in the detection value of reflected wave power. For a long-time variation in reflected wave power, control is performed based on a variation in a smoothed value obtained by smoothing detection values of reflected wave power. A reflected wave power control loop system includes a reflected wave power peak value dropping loop system and an arc blocking system that perform control based on a peak variation in reflected wave power and a reflected wave power amount dropping loop system that performs control based on a smoothed power amount of reflected wave power.

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Yokohama, Japan

Hiroshi Kunitama