Idemitsu Kosan Company, Limited

Kabushiki Kaisha Toshiba

The University of Tokyo

Kureha Chemical Industry Company, Limited

Car Mate Mfg. Co., Ltd.

Toa Nenryo Kogyo, K. K.

Semiconductor Process Laboratory Co., Ltd.

Hiroshi Komiyama

Yuusuke Sato

Shinichi Tatsuta

Naoki Tamaoki

Toshio Osawa

Hakuai Inoue

Hiroaki Shirakawa

Kouji Tsukamoto

Yasuyuki Egashira

Gear shift knob for automobiles

Method for forming an ultra microparticle-structure

This invention is directed to a method for the reform of an undercoating surface prior to the formation of a prospective film by the CVD technique using a reaction gas containing an ozone-containing gas having ozone contained in oxygen and TEOS. This method comprises the steps of forming an undercoating insulating film on a substrate by the use of a mixed gas consisting of an ozone-containing gas having ozone contained in oxygen in a concentration of not less than 4% and a first silicon-containing gas, and reforming the surface of said undercoating insulating film by exposing said surface to a second silicon-containing gas.

Method for reforming undercoating surface and method for production of

A simulation method for performing a simulation with respect to a trace object that an event occurs depending on a probability in a domain to be analyzed. The simulation method includes the step of dividing a flowing field into cells serving as domains to be analyzed, the step of arranging molecules serving as the target object in the cells, the step of performing the simulation such that the molecules are moved in the cells and the number of stickings or a sticking amount occurring on a wall surface or a film portion as the result of the movement larger than the number of times of the event or a change amount led by the probability, and the step of outputting, as a simulation result, a film profile obtained as the result of the simulation.

Simulation method with respect to trace object that event occurs in

Ultra-fine spherical particles of a metal oxide having an average particle diameter of 40 nm or smaller can be prepared by a method in which a vaporizable metal compound is vaporized and decomposed under heating to give ultra-fine particles of a metal oxide followed by immediate cooling down to a temperature at which coalescence of the fine particles are prevented from coalescence. The fine particles have characteristics such as an excellent power of ultraviolet scattering.

Ultra-fine spherical particles of metal oxide and a method for the

A gas-sensitive composite material comprises a porous dielectric having micropores and a thin film consisting of ultrafine metal particles dispersed in, and supported by, at least the porous surface layers of the dielectric. The gas-sensitive composite material is produced by a method comprising the steps of: forming a thin film of conductive ultrafine metal particles on at least the porous surface layers of a porous dielectric and dispersing the thin film metal, in a size similar to the pore opening, continuously or partly discontinuously in the porous layers, whereby a three-dimensional composite material is obtained.

Gas-sensitive composite material comprising metal and dielectric

A process for preparing a ceramic film wherein ultrafine particles of ceramics are produced in a vapor phase, a substrate is kept at a temperature lower than the temperature where the ultrafine particles are produced but high enough to allow the vapor phase reaction to proceed, forming a temperature gradient between the vapor phase and the substrate and thereby to deposit the ultrafine particles onto the substrate by utilizing a thermophoretic phenomenon, and the vapor phase reaction is allowed to continue on the ultrafine particles deposited on the substrate. After the formation of the film, the deposition of the ultrafine particles onto the substrate may be stopped while continuing the vapor reaction in the formed film to prepare a more dense film having reduced voids.

Process for preparation of ceramic film

Growing community of inventors

Tokyo, Japan

Hiroshi Komiyama