Ckd Corporation

Gigaphoton Inc.

Tokyo Electron Limited

Cdk Corporation

Kabushiki Kaisha Toshiba

Shimadzu Corporation

Shinwa Chemical Industries Ltd.

Mirapro Co., Ltd.

Hiroshi Itafuji

Masayuki Kouketsu

Masayo Okada

Takanobu Ishihara

Kenichi Goshima

Toshiyasu Inagaki

Katsuya Okumura

Yoshiyuki Kobayashi

Akihiro Kojima

Tsuneyuki Okabe

Hiroshi Kobayashi

Shuji Moriya

Masahide Gunji

Hideki Nagaoka

Minoru Ito

Hiroki Doi

Shinichi Nitta

Yoshihisa Sudo

Shigenobu Nishida

Masahito Itoh

Shinji Hayakawa

Mitsuyoshi Ohsaki

Masahiko Yada

Minoru Ueta

Yasushi Kohno

A powder feeder according to one aspect of the present disclosure is a powder feeding device that feeds powder from a feeder to a nozzle. The powder feeding device includes a cartridge configured to store the powder in an airtight condition, and includes the feeder. The cartridge includes a port from which the powder is stored and withdrawn, and an open/close valve for opening and closing the port. The feeder includes a connection portion to which the cartridge is removably connected, a supply port configured to supply the powder in the cartridge connected to the connection portion into the feeder, and an opening/closing valve for opening and closing the supply port. The feeder is configured to insert the powder supplied from the supply port to the feeder into the nozzle, and the cartridge and the feeder are configured to form an enclosed space between the port and the supply port in response to the cartridge being connected to the connection portion.

Powder feeding device, thermal spraying apparatus, powder feeding method, and thermal spraying method

A micromixer includes: a first channel plate where a first channel and a plurality of first branch channels are each formed by a non-through groove in a front surface, and a first confluence channel is formed by a non-through groove in a rear surface, and includes a first communication channel that communicates the first branch channels with the first confluence channel; a first lid plate that covers the front surface; a second channel plate where a second confluence channel is formed by a non-through groove in the front surface, and a second channel and a plurality of second branch each formed by a non-through groove in the rear surface, and includes a second communication channel that communicates the second branch channels with the second confluence channel; and a second lid plate that covers the rear surface of the second channel plate.

Micromixer

A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

EUV light source apparatus

A liquid control apparatuscontrols a spread mode of a liquid. The liquid control apparatusincludes a main bodyhaving an upper surfaceto which the liquid is supplied, and a meshwoven in a net-like shape and provided to be in contact with the upper surface. An inhibiting grooveis provided in the upper surfacein a portion that is in contact with the mesh. An introducing portfor introducing a gas from the inside of the main bodyinto the inhibiting grooveis provided in the main body. The introducing portis formed such that the gas is introduced into the inhibiting groovesubstantially parallel to the upper surface

Liquid control apparatus

A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.

Coupling apparatus for chemical fluid flow channel

A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.

Linear actuator and vacuum control device

A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.

Vacuum control valve and vacuum control apparatus

Target supply apparatus, control system, control apparatus and control circuit thereof

Vaporization device for a vaporization unit of a liquid control apparatus

A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.

Liquid vaporizer

A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface and a guiding member that is provided to contact an opposite side of the mesh form body to the main body side.

Woven mesh form liquid control apparatus

A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.

Liquid control device and mesh-like body assembly applied thereto

A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.

Growing community of inventors

Komaki, Japan

Hiroshi Itafuji