Canon Kabushiki Kaisha

Hiroshi Isoyama

Hiroshi Tanaka

Tadashi Aoki

Yoshinori Makita

Ken Katsukura

The present invention provides a lithography apparatus for forming a pattern on a substrate, including a motor configured to drive a table for holding the substrate in accordance with a driving profile, a setting unit configured to set one of a normal mode and a power saving mode as an operation mode of the motor, and a controller configured to change the driving profile when the power saving mode is set, such that an amount of generated heat of the motor caused by driving of the table is smaller than that in the normal mode, and the number of substrates to be processed by the lithography apparatus per unit time is satisfied.

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Utsunomiya, Japan

Hiroshi Isoyama