Shizuoka University

Omron Corporation

The University of Tokyo

Kabushiki Kaisha Saginomiya Seisakusho

Saginomiya Seisakusho, Inc.

Saginomiva Seisakusho, Inc.

Hiroshi Imamoto

Gen Hashiguchi

Hiroyuki Mitsuya

Hiroshi Toshiyoshi

Takashi Kasai

Toshiyuki Takahashi

Hisayuki Ashizawa

Masato Suzuki

Kazunori Ishibashi

Masatoshi Oba

Fumihiko Sato

Masaki Munechika

Tatsuhiko Sugiyama

Fumihito Kato

Akito Mori

The present invention enables frequency response in a wide band without lowering the Q value. This vibrational energy harvester device is provided with: a movable part capable of vibration in a vibration direction as a result of mechanical vibrational energy applied from the exterior, said movable part being provided with a first surface along the vibration direction; and a fixed part provided with a second surface facing the first surface of the movable part with an interval therebetween, said fixed part being configured so as to be positionally fixed even against vibrational energy. A plurality of projections protruding in a direction orthogonal to the vibration direction are formed so as to be arranged like comb teeth in the vibration direction on each of the first surface of the movable part and the second surface of the fixed part. An electret film is formed on at least the first surface of the fixed part or on at least the second surface of the movable part. The vibrational energy harvester device is configured so that the spring rate of the movable part is modulated as a function of the position of the vibration direction by electrostatic force acting between the movable part and the fixed part.

Vibrational energy harvester device

Provided is an electrostatic-type vibrational energy harvester device that makes it possible to efficiently rectify and charge power from low acceleration to high acceleration of vibrational energy applied from the exterior. The vibrational energy harvester device is provided with: a movable part capable of vibrating in a vibration direction as a result of mechanical vibrational energy, said movable part being provided with a first surface along the vibration direction; and a fixed part provided with a second surface facing the first surface of the movable part with a gap therebetween so that it is possible for the movable part to vibrate in the vibration direction. A plurality of recessed portions and protruding sections are formed in an alternating manner in the vibration direction on the surfaces of each of the first surface of the movable part and the second surface of the fixed part. An electret film is formed on at least one of the fixed part and the movable part. The vibrational energy harvester device is configured so that a force factor (electromechanical conversion factor) having a value that corresponds to the gap between the first surface of the movable part and the second surface of the fixed part becomes small when the vibration amplitude of the movable part is small and large when the vibration amplitude of the movable part is large.

An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

A vibration electrode plateis formed on the upper face of a silicon substratewith an insulating coat filminterposed in between. An opposing electrode plateis placed on the vibration electrode platewith an insulating coat film interposed in between, and acoustic holesare opened through the opposing electrode plate. Etching holesand, each having a semi-elliptical shape, are opened through the vibration electrode plateand the opposing electrode plateso as to face each other longitudinally. A concave sectionhaving a truncated pyramid shape is formed in the upper face of the silicon substrate, by carrying out an etching process through the etching holesand. The vibration electrode plateis held in the silicon substrateby a holding portionplaced between the etching holes

Capacitive vibration sensor and method for manufacturing same

Growing community of inventors

Tokyo, Japan

Hiroshi Imamoto