Toyota Jidosha Kabushiki Kaisha

Denso Corporation

Kabushiki Kaisha Toyota Chuo Kenkyusho

Hiroshi Hosokawa

Yusuke Yamashita

Masaru Senoo

Satoru Machida

Yasuhiro Hirabayashi

Yoshifumi Yasuda

Akitaka Soeno

Shinya Iwasaki

Kazuhiro Sakurai

Atsushi Imai

Jun Okawara

Koichi Nishikawa

Tsuyoshi Nishiwaki

Yuma Kagata

Shuhei Oki

Masanori Miyata

Yuki Yakushigawa

Takaya Nagai

Yuuma Kagata

A semiconductor device includes an IGBT region in which an IGBT element is formed and an FWD region in which an FWD element is formed. The IGBT region includes a first region and a second region different from the first region. The FWD region and the first region of the IGBT region have a carrier extraction portion that facilitates extraction of carriers injected from a second electrode compared to the second region when a forward bias for causing the FWD element to operate as a diode is applied between a first electrode and the second electrode.

Semiconductor device

An insulated gate bipolar transistor includes: a semiconductor substrate; an emitter electrode arranged on one main surface of the semiconductor substrate; and a trench gate arranged in a rectangular trench having a rectangular shape and disposed on the one main surface of the semiconductor substrate. The semiconductor substrate includes a body contact region and an emitter region in a rectangular region surrounded by the rectangular trench. The rectangular trench has a straight trench that constitutes one side of the rectangular trench. The body contact region is in contact with a side of the straight trench. The emitter region is in contact with the side of the straight trench, and is adjacent to the body contact region. The body contact region has a protrusion portion protruding in a depth direction from a center portion of the body contact region.

Insulated gate bipolar transistor and manufacturing method thereof

A method of manufacturing a semiconductor device includes: implanting charged particles into a first range and a second range in a semiconductor substrate from at least one of a first surface of the semiconductor substrate and a second surface of the semiconductor substrate located on an opposite side of the first surface so as to increase crystal defect densities in the first range and the second range; implanting n-type impurities into the first range from the first surface so as to make a region amorphous, the region being in the first range and disposed at the first surface; irradiating the first surface with first laser after the implantation of the charged particles and the implantation of the n-type impurities so as to heat the first range and the second range; and crystallizing the region which has been made amorphous in or after the irradiation of the first laser.

Method of manufacturing semiconductor device

A semiconductor substrate is provided with a first cell region, the first cell region including: an n-type emitter region; a p-type first top body region; an n-type first barrier region; an n-type first pillar region; and a p-type first bottom body region, the semiconductor substrate may further comprise: an n-type drift region; a p-type collector region; an n-type cathode region, the n-type first barrier region may include a first peak position where a peak of the n-type impurity density is present within a part linked to the n-type first pillar region, and a second peak position where a peak of the n-type impurity density is present within a part in contact with the gate insulating layer, and a depth of the first peak position from a front surface of the semiconductor substrate is different from a depth of the second peak position from the front surface of the semiconductor substrate.

A semiconductor layer of a reverse conducting insulated gate bipolar transistor is provided with a drift region of a first conductive type, a body region of a second conductive type that is disposed above the drift region, and a barrier region of the first conductive type that is disposed in the body region and electrically connects to the emitter electrode via a pillar member which extends from the one of main surfaces of the semiconductor layer. The barrier region is not contact with a side surface of the insulated trench gate.

Reverse conducting insulated gate bipolar transistor

A semiconductor layer of a reverse conducting insulated gate bipolar transistor is provided with a barrier region of the first conductive type, wherein the barrier region is disposed in the body region and electrically connects to the emitter electrode via a pillar member which extends from the one of main surfaces of the semiconductor layer. The barrier region includes a first barrier partial region, wherein a distance between the first barrier partial region and the drift region is a first distance, and a second barrier partial region, wherein a distance between the second barrier partial region and the drift region is a second distance which is longer than the first distance. The second barrier partial region is in contact with a side surface of an insulated trench gate.

A semiconductor device is provided with a silicon layer, an upper surface side aluminum layer containing silicon and an insulation film. The upper surface side aluminum layer contacts and is layered on a part of a surface of the silicon layer. The insulation film contacts and is layered on another part of the surface of the silicon layer. The insulation film is adjacent to and contacts the upper surface side aluminum layer. The insulation film includes an insulation film body and a plurality of first nodule segregated portions projecting from the insulation film body toward the upper surface side aluminum layer as seen along a vertical direction relative to the surface of the silicon layer. A corner is formed by a side surface of the insulation film body and a side surface of each of the first nodule segregated portions as seen along the vertical direction.

A semiconductor substrate comprises an IGBT region and a diode region. The IGBT region comprises: an n-type emitter region; a p-type IGBT body region; an n-type IGBT barrier region; an n-type IGBT drift region; a p-type collector region; a first trench; a first insulating layer; and a first gate electrode. The diode region comprises: a p-type diode top body region; an n-type diode barrier region; a p-type diode bottom body region; an n-type cathode region; a second trench; a second insulating layer; and a second gate electrode. An n-type impurity density of a specific part of the diode barrier region making contact with the second insulating layer is higher than an n-type impurity density of the IGBT barrier region.

An electrode for connecting an external electric wire to a body heated to a high temperature includes a high temperature side electrode made of a conductor connected to the heated body, and a low temperature side electrode connected at a first end thereof to the high temperature side electrode and at a second end thereof to the external electric wire. The low temperature side electrode is formed of a conductor covered by an insulating material with the conductor of the low temperature side electrode being made of a material having a conduction resistance smaller than that of the conductor of the high temperature side electrode. Thus, as the conductor of the low temperature side electrode has a smaller conduction resistance than the conductor of the high temperature side electrode, an increase in a resistance value is reduced even when the conductor of the low temperature side electrode is extended to lower the temperature at a connection to an external electric wire.

Growing community of inventors

Toyota, Japan

Hiroshi Hosokawa