Omron Corporation

Tokyo Electron Limited

Hiroshi Hashimoto

Keisuke Yano

Kenichiro Masaki

Fumio Satou

Yoshitaka Matsuda

Norio Uchihira

Kiyohisa Tateyama

Mitsuhiro Sakai

Masahiro Ono

Taijiro Fujiwara

Tomokazu Ikeda

Nobutomo Matsunaga

Shinya Tsuji

Yusuke Komoguchi

Masao Nagase

Kiyomitsu Yamaguchi

Yoshikazu Tajiri

Hajime Izutani

Masaaki Yoshida

Masaru Imoto

Kiyokazu Matsunaga

Yasuo Hayashi

Hirofumi Iwanaga

Yoshihiro Azuma

Tomakazu Ikeda

Tomoaki Yoshikawa

Fumihiko Okumura

Masanori Yamashita

A DIN rail installing portion structure of an electrical appliance and a socket are provided. A back cover of a socket includes: a fitting groove, which is fitted to a DIN rail; and a claw portion, which is formed on a first side surface portion of both side surface portions of the fitting groove. A first edge portion of the DIN rail is clamped by the claw portion to hold the socketon the DIN rail. The claw portion elastically presses a first edge portion of the DIN rail in a thickness direction. On the first edge portion side of the DIN rail, there is no claw of which a width of clamping the first edge portion in the thickness direction does not change.

DIN rail installing portion structure of electrical appliance and socket

A screwless terminal block allows easy insertion and removal of a wire. A housing () includes a fixture insertion opening () through which a rod-like fixture () is inserted to come in contact with a contact pressure spring () and deform the spring () away from a wire (). When the fixture () is inserted through the fixture insertion opening (), an acute angle of 45&#xb0; or less is formed by an axis of the fixture () and a straight line connecting a contact point A between the housing () and a part of the fixture () adjacent to the wire insertion opening () and a contact point B between the housing () and a part of the fixture () adjacent to the spring () at a cross-section taken along a plane including the axis of the fixture () and parallel to a pressing direction of the spring ().

Screwless terminal block

Relay socket

A terminal table unit is associated with an output apparatus such as valves and solenoids and an input apparatus such as switches and includes not only a main body with a control device and a memory device but also a cassette with a memory medium that is detachably attached to the main body. The control device receives input data from the input apparatus for controlling the output apparatus and drives the output apparatus according to the received input data. The received input data are temporarily stored in the memory device in specified units. When the input data are found to include abnormal data, the control device causes data stored in the memory device to be transferred to the memory medium of the cassette such that the memory cassette can be removed and the abnormal data stored on the memory medium can be analyzed elsewhere.

Terminal table unit

A solid state relay has a first external connection terminal which is conductive with one end of a main switching element, and a second external connection terminal which is conductive with another end of the main switching element, and is used with a load and a power source connected in series between the external connection terminals. A third external connection terminal is disposed in the solid state relay. The third external connection terminal is connected to the second external connection terminal via a capacitor. The load and the power source are connected in series between the first external connection terminal and the second external connection terminal, and a node of the load and the power source is connected to the third external connection terminal, thereby allowing the resistance of the load and the electrostatic capacitance of the capacitor to constitute an RC filter circuit for preventing noise leakage. Therefore, a solid state relay is obtained in which less EMI noise (noise terminal voltage) is generated, and which can be produced without especially increasing the cost and the size as compared with a relay of the conventional art.

Solid-state relay

A cleaning unit for cleaning a substrate is disclosed, that comprises a holding mechanism for rotatably and horizontally holding the substrate, a first traveling means for holding both sides of a cleaning mechanism having at least one cleaning member and for moving the cleaning mechanism in such a manner that the first traveling means is kept in parallel with the substrate held by the holding mechanism, and a second traveling means for holding both sides of a processing solution supplying mechanism having supplying mechanisms for supplying different types of processing solution and for moving the cleaning mechanism in such a manner that the second traveling means is kept in parallel with the substrate held by the holding mechanism. Thus, the strength of the cleaning unit according to the present invention is higher than the strength of a conventional cleaning unit that holds an arm on one side thereof. In addition, a process of a cleaning mechanism and a process of a supplying mechanism can be equally performed on the entire surface of the substrate.

Substrate cleaning unit and cleaning method

Disclosed is a processing apparatus comprising holding means, support means, process solution supply means, life means, and rotating means. A substrate to be processed is rotatably held by the holding means. An overhanging portion of the substrate extending over an edge of the holding means is supported by the support means to maintain a front surface of the substrate horizontally flat. A process solution is supplied from the process solution supply means onto the front surface of the substrate held by the holding means and supported by the support means. The substrate held by the holding means is vertically moved by the lift means relative to the support means. Further, the substrate moved upward relative to the support means is rotated by the rotating means.

Apparatus and method for supplying process solution to surface of

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Kumamoto, Japan

Hiroshi Hashimoto