Oht Inc.

Tohoku University

Hiroshi Hamori

Shigetoshi Sugawa

Tetsuya Goto

Shuji Yamaoka

Rihito Kuroda

Shogo Ishioka

Toshiro Yasuda

Shinichi Murakami

A capacitance detection area sensor includes capacitance sensor elements arranged in a two-dimensional array, is shaped into an appropriate shape, and capacitively coupled to an external electrode. To the external electrode, a sensing signal having a potential difference is supplied. The first and second sensor output signals are acquired from a capacitance sensor element capacitively coupled to the external electrode, at the timing of the sensing signal being a first signal and being a second signal, respectively. A differential signal is generated from a difference between the acquired first and second sensor output signals, and an image indicating the shape of the external electrode is generated based on the level of the differential signal, in different colors or different tones.

Capacitance detection area sensor and conductive pattern sensing apparatus having capacitance detection area sensor

Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns () each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns () are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means () each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot () operable to move each of the first and second detection means () across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.

Circuit pattern inspection instrument and pattern inspection method

Growing community of inventors

Fukuyama, Japan

Hiroshi Hamori