Murata Manufacturing Co., Ltd.

Hiroshi Hamamura

Kazuhiro Yoshida

An acceleration sensor includes a fixing portion, a weight portion, a detection beam, support beams, and a metal wiring. The weight portion is supported on the fixing portion so as to be freely displaced. The detection beam is connected to the fixing portion and the weight portion and piezoresistive elements are provided on the detection beam. The support beams are provided separately from the detection beam and are connected to the fixing portion and the weight portion. Both ends of the metal wiring are extended to the fixing portion and the metal wiring is wired so as to pass through the support beams.

MEMS piezoresistive acceleration sensor

An acceleration sensor includes weights, a support, and beams on which piezoresistive elements are disposed. The weights include projections and recesses. The support includes projections and recesses. The beams are connected to the projections and the recesses.

Acceleration sensor

A dynamic sensor includes a weight having an H shape in a plan view. The weight includes a first weight portion and a second weight portion which have substantially rectangular parallelepiped shapes and are aligned in a short side direction at an interval and a bridge portion which connects the first and second weight portions and extends in the aligned direction. The bridge portion connects the first and second weight portions at an approximate center thereof in a long side direction. Supports are located in a region between the first and second weight portions where the bridge portion is not provided. The first weight portion is connected to a first support via a first beam and to a second support via a second beam. The second weight portion is connected to the first support via a third beam and to the second support via a fourth beam.

Growing community of inventors

Nagaokakyo, Japan

Hiroshi Hamamura