Hitachi Chemical Company, Ltd.

Hiroshi Betsui

Toshihiro Kuroda

Daichi Sakai

Masao Uchigasaki

Kouta Segawa

The optical waveguide includes: a lower clad layer, a core layer, an upper clad layer, a substrate, and a mirror, the lower clad layer, the core layer, and the upper clad layer being sequentially laminated to the substrate, the mirror being formed on the core layer, in which the substrate has an opening, the maximum diameter of the opening is larger than that of luminous flux reflected by the mirror, and the maximum diameter of the opening is 240 &#x3bc;m or less. The optical waveguide is capable of transmitting a light signal regardless of the type of the substrate, suppressing the spread of a light signal reflected from the mirror, and transmitting a light signal with a low optical transmission loss.

Optical waveguide and manufacturing method thereof

The optical waveguide with mirrorof the present invention includes: a lower clad layer; a core patternformed above the lower clad layer; a mirrorformed on the inclined surfaceof the core pattern; an upper clad layercovering the part other than the mirroron the core pattern; and an openingwith an approximate pillar shape, the opening being formed on the upper clad layer, wherein the mirroris formed in the opening

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Ibaraki, Japan

Hiroshi Betsui