Origin Electric Company, Limited

Origin Company, Limited

Hiroshi Akama

Yutaka Matsumoto

Masami Kuroda

Hironobu Nishimura

Yukata Matsumoto

To provide a reducing gas supplying apparatus and a method for manufacturing a processed target object, which are capable of supplying a reducing liquid without causing it to scatter. The reducing gas supplying apparatusincludes a chamberdefining a space where soldering is performed on a target object T, a vaporizerfor generating a reducing gas FG to be supplied into the chamberby receiving a reducing liquid FL to be converted into the reducing gas FG and vaporizing the reducing liquid FL, an intermediate containerfor temporarily reserving the reducing liquid FL before the reducing liquid FL in a reducing liquid bottleis introduced into the vaporizer, a transport tube, a supply tube, a transport partfor delivering the reducing liquid FL in the bottleinto the intermediate container, and a supply partfor delivering the reducing liquid FL in the intermediate containerinto the vaporizer. The method includes supplying the object T into the chamber, performing soldering on the object T while supplying the reducing gas FG into the chamber, and taking the object T on which the soldering has been performed out of the chamber

Reducing gas supplying apparatus and method for manufacturing processed target object

To provide a thermal processing apparatus where a projection area perpendicular to the axis of a sealing structure and attachment structure of heat radiation heater is decreased and a chamber volume is decreased. The apparatus has a chamber for accommodating a workpiece of a thermal processing object, the chamber having a partition wall for partitioning inside from outside of the chamber, a heat radiation heater disposed penetrating the partition wall, wherein the heater has a ring seal arranged on an outer peripheral surface of the extension section, and hermetically sealing the chamber, and a heat blocking plate arranged between the heat radiation unit and the ring seal in the axial direction of the glass tube, for blocking heat radiated from the heat radiation unit to the ring seal, the heat blocking plate having an inner peripheral surface fitting along the extension section.

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Saitama, Japan

Hiroshi Akama