Hitachi, Ltd.

Kokusai Elect. Co. Ltd.

Hiroo Tochikubo

Noboru Akiyama

Masahiro Okamura

Takaya Suzuki

Shinya Iida

Yosuke Inoue

Masato Fujita

Akira Kanai

The vapor phase growth on semiconductor wafers is carried out by an apparatus in which a multiplicity of semiconductor wafers are held by a holder so that the semiconductor wafers lie one over another in a vertical direction, and are rotated together with the holder, the holder is placed in a heater disposed in a reaction vessel, a raw material gas supply nozzle and a raw material gas exhaust nozzle are provided within the heater so that the semiconductor wafers are interposed between the gas supply nozzle and the gas discharge nozzle, and the gas supply nozzle and the gas discharge nozzle have gas supply holes and gas discharge holes, respectively, so that a raw material gas can flow on each semiconductor wafer in horizontal directions. When the temperature of the heater is raised by a heating source to heat the semiconductor wafers, the raw material gas is supplied from the gas supply holes to each semiconductor wafer, and thus a uniform layer is grown on each semiconductor wafer from the raw material gas.

Vapor phase growth on semiconductor wafers

Herein disclosed is a method of fabricating a thick single-crystalline silicon film at a low temperature less than 1000.degree. C. The method is characterized in that, simultaneously as silicon polycrystals are grown on a substrate to form polycrystalline silicon, said polycrystals are irradiated and annealed with a laser or electron beam so that said polycrystalline silicon is single-crystallized to fabricate a single-crystalline silicon film.

Method of fabricating single-crystalline silicon films

Growing community of inventors

Tokyo, Japan

Hiroo Tochikubo