Canon Kabushiki Kaisha

Hiroo Katsuta

Kazunori Suzuki

Yuki Toriumi

A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.

Aligning method

A press apparatus for planar members is provided with a first transfer table for transferring a first planar member to a press position, a second transfer table for transferring a second planar member to the press position substantially simultaneously with the first transfer table, a device for aligning the first and second planar members, a device for effecting the parallel feeding of the first and second planar members, and a device for pressing the first and second planar members with a predetermined pressure.

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Kawasaki, Japan

Hiroo Katsuta