Sharp Kabushiki Kaisha Corporation

Jsr Corporation

Hitachi Techno Engineering Co., Ltd.

Hitachi Industries Co., Ltd.

Hironori Toyoshima

Makoto Nakahara

Yoshihisa Ohta

Takatoshi Kira

Daisuke Ikesugi

Isao Koromegawa

Naoki Watase

Terumi Ogawa

Tsuneyoshi Shimizu

Masashi Takagaki

In a solution emitting head for emitting a solution through an outlet, having a main body including a cavity, a cover attached to the main body in such a manner that the cover covers the cavity to form a chamber so that the solution is stored in the chamber temporarily before being emitted from the outlet, and a solution pressurizing device for pressurizing the solution in the chamber, the cover is fixedly attached to the main body by one of metal-to-metal bonding and an adhesive dissolution-resistant against the solution between the cover and the main body.

Solution injector head, functional layer forming apparatus and liquid crystal display

The present invention provides an aligning apparatus which is capable of aligning auxiliary connecting plates such as a testing fixture plate so as to fit to both sides of a substrate. A camera 13a monitors aligning marks provided on a substrate 6 and a first auxiliary connecting plate (i.e. a lower surface testing fixture plate) 8 to carry out an aligning operation by moving the substrate 6 by means of an XY.THETA. table 5. A first plate-fitting member (a vacuum suction member) 32 fixes the substrate 6 and the first auxiliary connecting plate 8. On the other hand, a camera 13b monitors aligning marks provided on the substrate 6 and a second auxiliary connecting plate (i.e. an upper surface testing fixture plate) 11 to carry out an aligning operation by moving the second auxiliary connecting plate 11 by means of the XY.THETA. table 5. A second plate-fitting member (a vacuum suction member) 33 fixes the substrate 6 and the second auxiliary connecting plate 11. Thus, the auxiliary connecting plates can be accurately aligned on both sides of the substrate through one table.

Aligning apparatus for substrate

Growing community of inventors

Nagareyama, Japan

Hironori Toyoshima