Seiko Epson Corporation

Hiromu Miyazawa

Takamitsu Higuchi

Setsuya Iwashita

Hiroshi Ito

Takayuki Yonemura

Jiro Kato

Koichi Morozumi

Toshihiro Shimizu

Toshiaki Mikoshiba

Satoshi Shimokawato

Tomoaki Nakamura

Satoshi Nebashi

Masayoshi Yamada

Takeshi Kijima

Takeo Kawase

Eiji Natori

Masaya Ishida

Shoji Hoshina

Tsukasa Funasaka

Kazumasa Hasegawa

Ichiro Asaoka

Tatsuya Shimoda

Kinya Ozawa

Hiroshi Matsuda

Jiro Tsuruno

Motohisa Noguchi

Masaaki Ichikawa

Eiju Hirai

Kanechika Kiyose

Junichi Karasawa

Yasuaki Hamada

Atsushi Takakuwa

Masayuki Omoto

Hiroshi Kato

Koji Sumi

Masao Nakayama

Masami Murai

Tomohiro Sakai

Tomoko Koyama

Tetsuya Isshiki

Taku Aoyama

Hiroaki Tamura

Toshiki Hara

Tomokazu Kobayashi

Akira Kuriki

Takashi Hashimoto

Maki Ito

Toshihito Takagi

Li Xin-Shan

Mayumi Hamada

Shinya Ootsuki

Naoki Takatsu

Oshi Iwakami

A liquid ejecting head includes a nozzle that is in communication with a pressure chamber and ejects a first liquid, a passage formation substrate that has a liquid passage which extends from a common liquid chamber in communication with a plurality of pressure chambers to the nozzle and through which the first liquid flows, and a circulation passage that is formed in the passage formation substrate, passes near the nozzle, and is not in communication with the liquid passage, and through which a second liquid circulates.

Liquid ejecting head and liquid ejecting apparatus

In a method of controlling a liquid ejecting apparatus, where the liquid ejecting apparatus includes a pressure chamber that communicates with a nozzle that ejects a liquid, a drive element that changes a pressure of the liquid in the pressure chamber, and a drive circuit that supplies the drive element with an ejection pulse that generates a change in the pressure that ejects the liquid from the nozzle, the method includes specifying a viscosity of the liquid in the nozzle and a surface tension of the liquid in the nozzle from a residual vibration when the pressure of the liquid in the pressure chamber is changed, and controlling a waveform of the ejection pulse according to the viscosity and the surface tension.

Liquid ejecting apparatus control method and liquid ejecting apparatus

A liquid ejecting apparatus is provided comprising: a liquid ejecting head; and a controller. The liquid ejecting head including: a nozzle from which a liquid is ejected; a first communication passage that is in communication with the first nozzle; a first pressure compartment; a first drive element that changes a pressure of the first pressure compartment; a first passage that connects the first pressure compartment and the first communication passage; a second pressure compartment; a second drive element that changes a pressure of the second pressure compartment; a second passage that connects the second pressure compartment and the first communication passage. The controller performs a first mode and a second mode, the first mode being a mode in which liquid flows from the first pressure compartment through the first communication passage to the nozzle, and liquid flows the second pressure compartment through the second communication passage to the nozzle, and, the second mode being a mode in which liquid flows from the first pressure compartment through the first communication passage to the nozzle, and liquid flows from the nozzle through the second communication passage to the second pressure compartment.

A piezoelectric element including a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium, and an electrode provided on the piezoelectric layer is provided. In the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986&#x2264;c/a&#x2264;1.014.

Piezoelectric element and liquid ejecting head including piezoelectric layer having improved lattice ratio

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Ultrasonic device, ultrasonic module, and ultrasonic measuring apparatus

A piezoelectric element including an electrode and a piezoelectric layer provided on the electrode and having a perovskite structure including lead, zirconium, and titanium is provided. A radial distribution function obtained from an extended X-ray absorption fine structure of an L3 absorption edge of lead in an X-ray absorption spectrum of the piezoelectric layer at an interface with the electrode satisfies a formula (1) below&#x2264;1&#x2003;&#x2003;(1)(in the formula (1), A represents an intensity of a peak attributable to oxygen atoms closest to lead atoms; and B represents an intensity of a peak attributable to oxygen atoms second closest to the lead atoms).

Piezoelectric element and liquid ejecting head

An ultrasonic sensor includes a vibration plate, a first electrode, a piezoelectric body, and a second electrode. The first electrode is laminated on the vibration plate, that has a length along a surface of the vibration plate in a first direction, and that has a width Wbe along the surface of the vibration plate in a second direction that is orthogonal to the first direction. The width Wbe is not more than the length. The piezoelectric body is laminated on the first electrode and has a width Wpz in the second direction. The second electrode is laminated on the piezoelectric body. A ratio Wbe/Wpz between the width Wbe of the first electrode and the width Wpz of the piezoelectric body is not less than 0.1 and not more than 0.8.

Ultrasonic sensor as well as probe and electronic apparatus

A liquid ejecting head includes: a nozzle from which a liquid is ejected; a communication passage that is in communication with the nozzle; a first pressure compartment that is connected to the communication passage through a first passage; a second pressure compartment that is connected to the communication passage through a second passage; a first drive element that changes pressure of the first pressure compartment; and a second drive element that changes pressure of the second pressure compartment.

A piezoelectric element includes a first electrode disposed over a substrate, an orientation control layer disposed over the first electrode and containing titanium, a piezoelectric layer disposed over the orientation control layer and having a perovskite crystal structure, and a second electrode disposed over the piezoelectric layer. The orientation control layer has a thickness in the range of 5.0 nm to 22.0 nm.

Piezoelectric element and liquid ejection head

A piezoelectric device includes a piezoelectric film having a first surface in contact with a vibrating film and a second surface on the opposite side to the first surface, first and second electrodes that are provided on the second surface of the piezoelectric film and that are disposed at positions away from each other and are short-circuited to each other at a position away from the piezoelectric film, and a third electrode that is provided between the first and second electrodes on the second surface of the piezoelectric film and is disposed at a position away from the first and second electrodes. At least parts of the contours of end portions of the first and second electrodes are defined in parallel to side portions of the third electrode.

Piezoelectric device, probe, electronic apparatus, and ultrasonic imaging apparatus

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

Ultrasonic device, ultrasonic module, and ultrasonic measuring device

Provided is a liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer. The piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945&#x2264;c/a&#x2264;1.012, and the thickness of the piezoelectric device is twice or more the thickness t (t&#x3c;5 &#x3bc;m) of the piezoelectric layer.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device

A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.

Piezoelectric element, probe, and ultrasonic measurement apparatus

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Azumino, Japan

Hiromu Miyazawa