Other

Tokyo Electron Limited

Taisei Corporation

Nichias Co., Ltd.

Hiromu Itoh

Naoki Mori

Sadao Kobayashi

Yoshihide Wakayama

Isao Terada

Kazuo Saito

Yasuyuki Shirai

Koji Suzuki

Tadahiro Ohmi

Hitoshi Inaba

Osamu Suenaga

Yuji Matumura

Hideo Hanaoka

Takashi Taniguchi

Toshihisa Okabe

Kikuji Kobayashi

Minoru Tanaka

A method of cleaning air, including a humidifying operation for humidifying the air containing chemical contaminants by a humidifier and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air, and a dehumidifying operation for dehumidifying the humidified air by a condenser and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying operation into condensed water for removal. By using an oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifier and condenser.

Method and device for cleaning air

An air cooling device includes at least one cooling unit which includes an oblique honeycomb having front, rear, upper, and lower openings and disposed so that air to be cooled is introduced into the front opening and cooled air is discharged from the rear opening, a cooling water supply means which supplies cooling water to the upper opening of the oblique honeycomb, and a water receiving section which receives discharge water discharged from the lower opening of the oblique honeycomb, and a blower means which introduces air to be cooled into the front opening of the oblique honeycomb and allows cooled air to be discharged from the rear opening of the oblique honeycomb, wherein the height of one oblique honeycomb in the cooling unit is 200 to 800 mm. The air cooling device has high thermal efficiency, a small liquid-gas ratio, and a small pressure drop, and is capable of saving space and energy.

Air cooling device and air cooling method

Growing community of inventors

Tokyo, Japan

Hiromu Itoh