Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,326 patents)
2 patents:
1. 10256127 - Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium
2. 9507349 - Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium