Kabushiki Kaisha Yaskawa Denki

Other

Hiromitsu Akae

Go Yamaguchi

Osamu Komiyaji

Hidenori Hara

Minoru Koga

Tadataka Noguchi

Sohei Oga

Yuki Honda

Mina Orii

Masanobu Harada

Kensuke Oni

Norihisa Iwasaki

A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.

Transfer system, transfer method, and transfer apparatus

A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.

Vacuum robot, vacuum motor, and vacuum motor encoder

A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.

Substrate transport with mobile buffer

A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.

Robot system, robot controlling method, and semiconductor manufacturing system

A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.

Conveying system and method for controlling conveying system

A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.

Conveying system and method for constructing conveying equipment

An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.

Growing community of inventors

Fukuoka, Japan

Hiromitsu Akae