Wacoh Corporation

Hiromichi Itano

Kazuhiro Okada

Nobumitsu Taniguchi

A bottom fixed layer , displacement layer , and top fixed layer are fixed in a layered structure by way of intervening pedestals , which serve as spacers between the layers. The bottom and top fixed layers are rigid dielectric substrates. The displacement layer is a flexible conductive substrate. On the top of the bottom fixed layer are formed an electrode E on the right, electrode E on the left, and a washer-shaped electrode E in the middle. On the bottom of the top fixed layer are formed an electrode E on the right, electrode E on the left, and a washer-shaped electrode E in the middle. These electrodes and the displacement layer together form capacitance elements C to C . When acceleration acts on the working body , the displacement layer is displaced and a change in capacitance occurs in various capacitance elements. The X-axis acceleration component can then be calculated as (C &plus;C ) -(C &plus;C ), and the Z-axis acceleration component can be calculated as C -C

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Ageo, Japan

Hiromichi Itano