Kanto Denka Kogyo Co., Ltd.

Hiromi Oya

Katsuhiro Saito

Shinsuke Katayama

Hiroyuki Uehara

Shinji Mita

Yasuyuki Fujiwara

Ichiro Morimoto

Norihisa Kimura

A method for obtaining high-purity phosphorus pentafluoride (PF), which is industrially useful in the fields of semiconductors and batteries, from PFcontaining a gas mixture of HCl, HF, and so on. Specifically, provided is a process for purifying phosphorus pentafluoride including () an immobilization step in which phosphorus pentafluoride containing a mixture is brought into contact with a metal fluoride (MF; M is an n-valent metal) having a specific surface area of 1.0 m/g or more at 40&#xb0; to 150&#xb0; C. to immobilize phosphorus pentafluoride in the form of a hexafluorophosphate (M(PF)), () a separation step in which the mixture remaining in the gas phase is expelled out of the reaction system to separate the mixture from the hexafluorophosphate, and () a heat-decomposition step in which the hexafluorophosphate freed of the mixture is heated at 150&#xb0; to 400&#xb0; C. under a pressure of &#x2212;0.1 to 0.1 MPa&#xb7;G to give phosphorus pentafluoride.

Process for purifying phosphorus pentafluoride

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Okayama, Japan

Hiromi Oya