Kokusai Electric Corporation

Hitachi-Kokusai Electric Inc.

Techno Quartz Inc.

Hiromi Okada

Shinya Morita

Masayoshi Minami

Satoshi Aizawa

Masayuki Yamada

Nobuhito Shima

Yoshitaka Abe

Mamoru Ohishi

Kazuyuki Okuda

Satoru Murata

Atsushi Hirano

Yoshikazu Takashima

Kazuhisa Osaka

Tomoyuki Kurata

A gas supply structure capable of suppressing damage to a structure provided in a reaction tube and made of the non-metallic material such as quartz includes: a gas supply nozzle through which a process gas is supplied into a process chamber in a reaction tube via an opening; a first seal provided so as to cover at least a gap between the opening of the reaction tube and the gas supply nozzle; a holder connected to the gas supply nozzle so as to provide a gap between the gas supply nozzle and the holder; an adapter connected to the holder; a first fixing structure configured to hold the holder and the adapter; and a second seal provided so as to cover at least a gap between the gas supply nozzle and the adapter and maintain a space between the gas supply nozzle and the adapter in an airtight state.

Gas supply structure and substrate processing apparatus

Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

Nozzle installation jig

Rotary tool for boat of semiconductor manufacturing apparatus

Pattern wafer

Growing community of inventors

Toyama, Japan

Hiromi Okada