Oki Electric Industry Co., Ltd.

Hiroki Yaegashi

Hideaki Okayama

Osamu Gotoh

Toshimasa Ishida

Hideaki Horikawa

Kohji Yamada

A method of manufacturing a semiconductor device for forming with high accuracy a marker used for separating a semiconductor device 10, wherein a plurality of semiconductor devices 10 are fabricated in a semiconductor substrate 16 are separated, and wherein etched grooves 31 are formed outside the semiconductor regions in the semiconductor substrate 16.

Method of manufacturing semiconductor device

There is provided an optical wave-length filter which is constituted by a wave-guide route formed on a surface of a substrate; a front stage polarizer disposed in the wave-guide route for transmitting as an input light either TM mode light or TE mode light; a plurality of mode-converters disposed in the wave-guide route for mode converting one TM/TE-mode light transmitted from the front stage polarizer having a conversion wave length corresponding to an output light of the optical wave-length filter into the other TE/TM-mode light; and a rear stage polarizer disposed in the wave-guide route for transmitting as the output light of the optical wave-length filter the other TE/TM-mode light; the mode-converters being constituted by a finger-type electrode for control and a finger-type electrode for earthing interdigitally coupled for each other and disposed along the wave-guide route.

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Tokyo, Japan

Hiroki Yaegashi