Kabushiki Kaisha Yaskawa Denki

Ebara Corporation

Hiroki Sanemasa

Osamu Komiyaji

Masatoshi Furuichi

Kazunori Hino

Kazunari Shiraishi

Hitoshi Wakizako

Yukito Sagasaki

Ken-ichi Motonaga

Ryosuke Watanabe

Seiji Katsuoka

Takahiro Ogawa

Natsuki Makino

Masanobu Kakihara

Hidetaka Nakao

Daisuke Shin

Osamu Harada

Hideo Yamamoto

Yuki Honda

Hisaya Inoue

Masayuki Suzuki

Naoomi Torii

A transfer robot includes a plurality of hands, a plurality of hand drive motors, and an arm. The plurality of hands are capable of holding a transfer target object, and pivot individually around a pivoting axis. The plurality of hand drive motors are arranged in a direction following the pivoting axis, such that a motor axis to which the plurality of hands are each connected becomes concentric with the pivoting axis, and directly drive the plurality of hands, respectively. The arm includes therein the plurality of hand drive motors.

Transfer robot and robot system

A transfer system includes a transfer chamber having transfer positions, a first robot provided in the transfer chamber to transfer articles between the transfer positions, a second robot provided in the transfer chamber to transfer articles between the transfer positions, and a retreat unit configured to move one robot among the first robot and the second robot to a retreat position by changing a height of the one robot such that the one robot does not interfere with an operating range of another robot among the first robot and the second robot.

Transfer system and transfer method

A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.

Conveyance system, robot, and method for controlling robot

A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.

Robot with plurality of belts and intermediate pulley

A gear unit includes an inner shaft and an outer shaft concentrically arranged to make up two concentric output shafts; and a first and a second input shaft extending in a direction orthogonal to the output shafts and operatively connected to the inner shaft and the outer shaft, respectively. The inner shaft includes an inner gear attached thereto and the outer shaft includes an outer gear attached thereto. The inner gear and the outer gear are arranged in a mutually-opposing relationship. The first input shaft and the second input shaft are spaced apart from each other by a specified distance along an axial direction of the output shafts. The first input shaft includes a first input gear meshing with the inner gear and the second input shaft includes a second input gear meshing with the outer gear.

Gear unit and robot

A handis constituted by a hand baseserving as a base portion, a rocking handdisposed to be superposed on the hand baseand serving to support a substrate, and a rocking mechanismprovided between the hand baseand the rocking handand serving to support the rocking handto be tiltable and movable in parallel with respect to the hand base

Hand having rocking mechanism and substrate delivering device having the same

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

Transfer robot and inspection method for thin substrate

Growing community of inventors

Fukuoka, Japan

Hiroki Sanemasa